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Reel/Frame:018418/0385   Pages: 3
Recorded: 10/20/2006
Attorney Dkt #:5051-622
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/11/2011
Application #:
11551498
Filing Dt:
10/20/2006
Publication #:
Pub Dt:
04/26/2007
Title:
METHODS AND APPARATUS FOR REDUCING BUILDUP OF DEPOSITS IN SEMICONDUCTOR PROCESSING EQUIPMENT
Assignor
1
Exec Dt:
10/06/2006
Assignee
1
4600 SILICON DRIVE
DURHAM, NORTH CAROLINA 27703
Correspondence name and address
DAVID C. HALL
PO BOX 37428
RALEIGH, NC 27627

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