Patent Assignment Details
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| Reel/Frame: | 021956/0386 | |
| Pages: | 4 |
| | Recorded: | 12/10/2008 | | |
| Attorney Dkt #: | 2008-003 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/03/2010
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Application #:
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12331937
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Filing Dt:
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12/10/2008
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Publication #:
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Pub Dt:
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09/10/2009
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Title:
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METHOD TO IMPROVE UNIFORMITY OF CHEMICAL MECHANICAL POLISHING PLANARIZATION
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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VARIAN SEMICONDUCTOR EQUIPMENT ASSC., IN
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35 DORY RD.
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GLOUCESTER, MA 01930-2297
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