Patent Assignment Details
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| Reel/Frame: | 030270/0391 | |
| Pages: | 9 |
| | Recorded: | 04/23/2013 | | |
| Attorney Dkt #: | 1508V2011172 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/10/2015
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Application #:
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13829979
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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TECHNIQUES FOR PROCESSING PHOTORESIST FEATURES USING IONS
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
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35 DORY ROAD
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GLOUCESTER, MA 01930-2297
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