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Total properties:
14
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09150669
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Filing Dt:
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09/10/1998
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Title:
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ELECTROSTATIC CHUCKS
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09414717
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Filing Dt:
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10/12/1999
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Title:
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APPARATUS AND METHODS FOR SPUTTERING
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09477819
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Filing Dt:
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01/05/2000
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Publication #:
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Pub Dt:
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01/03/2002
| | | | |
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Title:
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SPUTTERING APPARATUS
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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09548014
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Filing Dt:
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04/12/2000
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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METHOD AND DEPOSITING A LAYER
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09568987
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Filing Dt:
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05/11/2000
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Title:
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DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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12/17/2002
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Application #:
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09673081
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Filing Dt:
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03/29/2001
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Title:
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INDUCTIVE COIL ASSEMBLY HAVING MULTIPLE COIL SEGMENTS FOR PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
|
06/11/2002
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Application #:
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09704714
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Filing Dt:
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11/03/2000
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Title:
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METHOD OF FORMING A BARRIER LAYER
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|
|
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Patent #:
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Issue Dt:
|
03/11/2003
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Application #:
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09834880
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Filing Dt:
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04/16/2001
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Publication #:
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Pub Dt:
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10/25/2001
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Title:
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METHOD OF COOLING AN INDUCTION COIL
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10182869
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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01/02/2003
| | | | |
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Title:
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ELECTROSTATIC CLAMPING
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10242762
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Filing Dt:
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09/13/2002
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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METHODS OF FORMING NITRIDE FILMS
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10290283
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Filing Dt:
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11/08/2002
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Publication #:
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Pub Dt:
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05/15/2003
| | | | |
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Title:
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METHOD OF FORMING A PATTERNED METAL LAYER
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10419113
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/30/2003
| | | | |
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Title:
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PLASMA PROCESSING APPARATUS
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|
|
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10464468
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Filing Dt:
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06/19/2003
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Publication #:
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Pub Dt:
|
01/08/2004
| | | | |
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Title:
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DEPOSITION METHODS AND APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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10/31/2006
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Application #:
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10483805
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Filing Dt:
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09/15/2004
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Publication #:
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Pub Dt:
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03/03/2005
| | | | |
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Title:
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DEPOSITING A TANTALUM FILM
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