Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 042002/0399 | |
| Pages: | 3 |
| | Recorded: | 04/13/2017 | | |
| Attorney Dkt #: | TTCA-643US2-0RD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/22/2019
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Application #:
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15486928
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Filing Dt:
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04/13/2017
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Publication #:
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Pub Dt:
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03/01/2018
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Title:
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IN-SITU SPACER RESHAPING FOR SELF-ALIGNED MULTI-PATTERNING METHODS AND SYSTEMS
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Assignee
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| 3-1 AKASAKA 5-CHOME |
| AKASAKA BIZ TOWER |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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