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Reel/Frame:027301/0400   Pages: 6
Recorded: 11/30/2011
Attorney Dkt #:17979-0001009
Conveyance: A MODIFYING CONVERSION
Total properties: 2
1
Patent #:
Issue Dt:
07/01/2014
Application #:
12946380
Filing Dt:
11/15/2010
Publication #:
Pub Dt:
03/24/2011
Title:
MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE SYSTEM FOR CARRYING OUT THE METHOD
2
Patent #:
Issue Dt:
09/11/2012
Application #:
13030748
Filing Dt:
02/18/2011
Publication #:
Pub Dt:
06/16/2011
Title:
METHOD OF MEASURING A DEVIATION OF AN OPTICAL SURFACE FROM A TARGET SHAPE
Assignor
1
Exec Dt:
10/14/2010
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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