Patent Assignment Details
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| Reel/Frame: | 012335/0402 | |
| Pages: | 2 |
| | Recorded: | 11/30/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09996955
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Filing Dt:
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11/30/2001
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Title:
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ETCHING PROCESS FOR FORMING THE TRENCH WITH HIGH ASPECT RATIO
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 3, LI-HSIN RD. 2, |
| HSIN-CHU CITY, TAIWAN R.O.C |
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Correspondence name and address
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LOWE HAUPTMAN ET AL
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BENJAMIN J. HAUPTMAN
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1700 DIAGONAL ROAD, SUITE 310
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ALEXANDRIA, VA 22314
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