Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 027184/0423 | |
| Pages: | 5 |
| | Recorded: | 11/07/2011 | | |
| Attorney Dkt #: | 125055-810 |
| Conveyance: | RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). |
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Total properties:
6
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09401754
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Filing Dt:
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09/23/1999
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Title:
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MULTI-LAYER SPUTTER DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09404516
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Filing Dt:
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09/23/1999
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Title:
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IN-LINE SPUTTER DEPOSITION SYSTEM
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09469382
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Filing Dt:
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12/22/1999
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Title:
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PERMANENT MAGNET ECR PLASMA SOURCE WITH INTEGRATED MULTIPOLAR MAGNETIC CONFINEMENT
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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09916643
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09917223
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
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Patent #:
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Issue Dt:
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11/23/2004
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Application #:
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09917224
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
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Assignee
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| 900 MIDDLESEX TURNPIKE |
| BUILDING 6 |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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KRISTEN I. SPANO
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150 WEST JEFFERSON AVENUE
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SUITE 2500
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DETROIT, MI 48226
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