Patent Assignment Details
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| Reel/Frame: | 013275/0428 | |
| Pages: | 3 |
| | Recorded: | 09/06/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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10236203
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Filing Dt:
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09/06/2002
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Publication #:
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Pub Dt:
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03/11/2004
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Title:
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IN-SITU SEQUENTIAL HIGH DENSITY PLASMA DEPOSITION AND ETCH PROCESSING FOR GAP FILL
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Assignee
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| 2200 MISSION BLVD. |
| SANTA CLARA, CALIFORNIA 95054-1549 |
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Correspondence name and address
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TIMOTHY N. TROP
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RHONDA L. SHELDON
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8554 KATY FREEWAY
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STE. 100
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HOUSTON, TX 77024-1841
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