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Reel/Frame:041424/0431   Pages: 5
Recorded: 03/01/2017
Attorney Dkt #:35111U
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
15446192
Filing Dt:
03/01/2017
Publication #:
Pub Dt:
09/07/2017
Title:
METAL CONTAMINATION PREVENTING METHOD AND APPARATUS AND SUBSTRATE PROCESSING METHOD AND APPARATUS USING THE SAME
Assignors
1
Exec Dt:
02/21/2017
2
Exec Dt:
02/21/2017
Assignee
1
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHROME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondence name and address
NATH, GOLDBERG, & MEYER
112 SOUTH WEST STREET
35111U JLM/JMB
ALEXANDRIA, VA 22314

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