Patent Assignment Details
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Reel/Frame: | 011786/0433 | |
| Pages: | 3 |
| | Recorded: | 07/26/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09681962
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Filing Dt:
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06/29/2001
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Title:
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Sputtering chamber with moving table producing orbital motion of target for improved uniformity
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Assignee
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2077 N. CAPITAL AVE. |
SAN JOSE, CALIFORNIA 95132 |
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Correspondence name and address
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STUART T. AUVINEN
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429 26TH AVE.
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SANTA CRUZ, CA 95062
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