Patent Assignment Details
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Reel/Frame: | 008134/0445 | |
| Pages: | 3 |
| | Recorded: | 07/18/1996 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08683248
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Filing Dt:
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07/18/1996
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Title:
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METHOD OF PREVENTING DEFECTS AND PARTICLES PRODUCED AFTER TUNGSTEN ETCH BACK
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Assignee
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1, SCIENCE-BASED INDUSTRIAL PARK |
NO. 1, CREATION RD. |
HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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PENNIE & EDMONDS
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NANDA K. ALAPATI
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1667 K STREET, N.W.
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WASHINGTON, D.C. 20006
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