Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 010052/0458 | |
| Pages: | 4 |
| | Recorded: | 06/28/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
6
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Patent #:
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Issue Dt:
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04/24/1990
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Application #:
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06864282
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Filing Dt:
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05/16/1986
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Title:
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FLOATING SUBCARRIERS FOR WAFER POLISHING APPARATUS
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Patent #:
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Issue Dt:
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04/27/1993
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Application #:
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07811568
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Filing Dt:
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12/20/1991
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Title:
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WAFER POLISHER HEAD HAVING FLOATING RETAINER RING
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08119972
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Filing Dt:
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09/09/1993
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Title:
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ROTARY UNION FOR COUUPLING FLUIDS IN A WAFER POLISHING APPARATUS
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Patent #:
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Issue Dt:
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06/18/1996
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Application #:
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08449556
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Filing Dt:
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05/24/1995
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Title:
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WAFER POLISHER HEAD ADAPTED FOR EASY REMOVAL OF WAFERS
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09261112
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Filing Dt:
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03/03/1999
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Title:
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CHEMICAL MECHANICAL POLISHING HEAD ASSEMBLY HAVING FLOATING WAFER CARRIER AND RETAINING RING
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09294547
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Filing Dt:
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04/19/1999
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Title:
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CHEMICAL MECHANICAL POLISHING HEAD HAVING FLOATING WAFER RETAINING RING AND WAFER CARRIER WITH MULTI-ZONE POLISHING PRESSURE CONTROL
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Assignee
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| 1-6-1 OHTEMACHI, CHIYODA-KU |
| TOKYO, JAPAN 100-0 |
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Correspondence name and address
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FLEHR HOHBACH TEST ALBRITTON & HERBERT
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R. MICHAEL ANANIAN
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FOUR EMBARCADERO CENTER
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SUITE 3400
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SAN FRANCISCO, CA 94111-4187
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