Patent Assignment Details
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| Reel/Frame: | 056332/0476 | |
| Pages: | 10 |
| | Recorded: | 05/24/2021 | | |
| Attorney Dkt #: | 2857.9110003 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/26/2022
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Application #:
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16645672
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Filing Dt:
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03/09/2020
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Publication #:
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Pub Dt:
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08/20/2020
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Title:
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Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method
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Assignee
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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