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Patent Assignment Details
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Reel/Frame:031002/0479   Pages: 3
Recorded: 08/13/2013
Attorney Dkt #:27276-23375
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
13966103
Filing Dt:
08/13/2013
Publication #:
Pub Dt:
03/06/2014
Title:
COOLING SUBSTRATE AND ATOMIC LAYER DEPOSITION APPARATUS USING PURGE GAS
Assignor
1
Exec Dt:
08/10/2013
Assignee
1
3191 LAURELVIEW COURT
FREMONT, CALIFORNIA 94538
Correspondence name and address
DOHYUN AHN
801 CALIFORNIA STREET
FENWICK & WEST LLP
MOUNTAIN VIEW, CA 94041

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