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Reel/Frame:056088/0481   Pages: 4
Recorded: 04/29/2021
Attorney Dkt #:ZIMR/0519USP
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17282280
Filing Dt:
04/01/2021
Publication #:
Pub Dt:
12/16/2021
Title:
METHOD FOR CLEANING A VACUUM SYSTEM, METHOD FOR VACUUM PROCESSING OF A SUBSTRATE, AND APPARATUS FOR VACUUM PROCESSING A SUBSTRATE
Assignor
1
Exec Dt:
02/06/2019
Assignee
1
SIEMENSSTRASSE 100
ALZENAU, GERMANY 63755
Correspondence name and address
PATTERSON & SHERIDAN, LLP - - APPLIED MA
24 GREENWAY PLAZA
SUITE 1600
HOUSTON, TX 77046

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