Patent Assignment Details
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Reel/Frame: | 006069/0487 | |
| Pages: | 3 |
| | Recorded: | 03/26/1992 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/29/1993
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Application #:
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07858094
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Filing Dt:
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03/26/1992
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Title:
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ACOUSTICAL METHOD AND SYSTEM FOR DETECTING AND CONTROLLING CHEMICAL- MECHANICAL POLISHING (CMP) DEPTHS INTO LAYERS OF CONDUCTORS, SEMICONDUCTORS, AND DIELECTRIC MATERIALS
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Assignee
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2805 E. COLUMBIA ROAD |
BOISE, IDAHO 83706 |
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Correspondence name and address
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WILLIAM J. BETHURUM
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JEFFERSON PLACE, SUITE 304
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350 N. NINTH STREET
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BOISE, ID 83702
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