Patent Assignment Details
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| Reel/Frame: | 035819/0487 | |
| Pages: | 2 |
| | Recorded: | 06/10/2015 | | |
| Attorney Dkt #: | 2010P00220US01/002-045002 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/06/2017
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Application #:
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14674724
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Filing Dt:
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03/31/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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MATERIAL SUPPLY APPARATUS FOR EXTREME ULTRAVIOLET LIGHT SOURCE HAVING A FILTER CONSTRUCTED WITH A PLURALITY OF OPENINGS FLUIDLY COUPLED TO A PLURALITY OF THROUGH HOLES TO REMOVE NON-TARGET PARTICLES FROM THE SUPPLY MATERIAL
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Assignee
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| PO BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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DIBERARDINO MCGOVERN IP GROUP LLC
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PO BOX 7126
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ALEXANDRIA, VA 22307
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