Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 016499/0491 | |
| Pages: | 3 |
| | Recorded: | 04/27/2005 | | |
| Attorney Dkt #: | 55071-441 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/10/2007
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Application #:
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11044711
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Filing Dt:
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01/28/2005
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Publication #:
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Pub Dt:
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08/18/2005
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Title:
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METHOD OF PREDICTING AND MINIMIZING MODEL OPC DEVIATION DUE TO MIX/MATCH OF EXPOSURE TOOLS USING A CALIBRATED EIGEN DECOMPOSITION MODEL
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Assignee
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| P.O. BOX 324 |
| VELDHOVEN, AH 5500, NETHERLANDS |
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Correspondence name and address
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MCDERMOTT WILL & EMERY LLP
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600 13TH STREET, N.W.
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WASHINGTON, DC 20005-3096
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