Patent Assignment Details
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Reel/Frame: | 012867/0494 | |
| Pages: | 6 |
| | Recorded: | 05/03/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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10138742
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Filing Dt:
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05/03/2002
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Title:
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METHOD AND APPARATUS FOR DETECTING BACKSIDE CONTAMINATION DURING FABRICATION OF A SEMICONDUCTOR WAFER
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Assignee
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1551 MCCARTHY BLVD. |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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BARNES & THORNBURG
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SHAWN D. BAUER
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11 S. MERIDIAN STREET
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INDIANAPOLIS, IN 46204
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