Patent Assignment Details
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| Reel/Frame: | 035485/0504 | |
| Pages: | 3 |
| | Recorded: | 04/24/2015 | | |
| Attorney Dkt #: | TF15HMK003 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14625628
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Filing Dt:
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02/19/2015
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Publication #:
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Pub Dt:
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06/11/2015
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Title:
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Operating Method of Slit Valve for Semiconductor Wafer Processing Chamber
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Assignee
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| #101, SECTION 2, KUANG FU ROAD, |
| HSIN CHU CITY, TAIWAN 30013 |
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Correspondence name and address
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CHIH FENG YEH
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188 OLD CASTLE POINT ROAD
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WAPPINGERS FALLS, NY 12590-7069
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