Patent Assignment Details
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| Reel/Frame: | 012245/0509 | |
| Pages: | 3 |
| | Recorded: | 10/12/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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09905536
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Filing Dt:
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07/13/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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GAS CLUSTER ION BEAM SIZE DIAGNOSTICS AND WORKPIECE PROCESSING
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Assignee
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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PERKINS, SMITH & COHEN, LLP
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KATHRYN E. NOLL
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ONE BEACON STREET
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30TH FLOOR
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BOSTON, MA 02108
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