Patent Assignment Details
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Reel/Frame: | 007530/0510 | |
| Pages: | 4 |
| | Recorded: | 06/07/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/10/1998
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Application #:
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08476966
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Filing Dt:
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06/07/1995
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Title:
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ELECTRODE DESIGNS FOR CONTROLLING UNIFORMITY PROFILES IN PLASMA PROCESSING REACTORS
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Assignee
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LEGAL DEPARTMENT E-339 |
3100 HANSEN WAY |
PALO ALTO, CALIFORNIA 94304 |
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Correspondence name and address
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SARA K. DOE
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VARIAN ASSOCIATES, INC.
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LEGAL DEPARTMENT M/S 339
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3100 HANSEN WAY
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PALO ALTO, CA 94304
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