Patent Assignment Details
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| Reel/Frame: | 017572/0511 | |
| Pages: | 3 |
| | Recorded: | 05/03/2006 | | |
| Attorney Dkt #: | 28944/50023 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/20/2009
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Application #:
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10570726
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Filing Dt:
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03/06/2006
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Publication #:
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Pub Dt:
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06/07/2007
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Title:
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METHOD AND DEVICE FOR LITHOGRAPHY BY EXTREME ULTRAVIOLET RADIATION
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Assignee
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| 31-33, RUE DE LA FEDERATION |
| PARIS, FRANCE 75015 |
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Correspondence name and address
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THOMAS A. MILLER
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MILLER, MATTHIAS & HULL
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ONE NORTH FRANKLIN STREET
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SUITE 2350
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CHICAGO, IL 60606
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