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Total properties:
18
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Patent #:
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Issue Dt:
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01/19/2016
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Application #:
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13338580
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Filing Dt:
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12/28/2011
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Publication #:
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Pub Dt:
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07/04/2013
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Title:
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SYSTEM AND METHOD FOR EXTENDING GAS LIFE IN A TWO CHAMBER GAS DISCHARGE LASER SYSTEM
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Patent #:
|
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Issue Dt:
|
09/10/2013
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Application #:
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13445195
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Filing Dt:
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04/12/2012
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Publication #:
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Pub Dt:
|
09/13/2012
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
|
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Issue Dt:
|
03/25/2014
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Application #:
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13535148
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Filing Dt:
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06/27/2012
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Publication #:
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Pub Dt:
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12/05/2013
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Title:
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SYSTEM AND METHOD FOR SEPARATING A MAIN PULSE AND A PRE-PULSE BEAM FROM A LASER SOURCE
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Patent #:
|
|
Issue Dt:
|
12/03/2013
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Application #:
|
13549261
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Filing Dt:
|
07/13/2012
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Publication #:
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Pub Dt:
|
12/05/2013
| | | | |
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Title:
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SYSTEM AND METHOD TO OPTIMIZE EXTREME ULTRAVIOLET LIGHT GENERATION
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Patent #:
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Issue Dt:
|
08/19/2014
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Application #:
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13607623
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Filing Dt:
|
09/07/2012
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Publication #:
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Pub Dt:
|
03/13/2014
| | | | |
|
Title:
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SYSTEM AND METHOD FOR SEED LASER MODE STABILIZATION
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|
|
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Patent #:
|
|
Issue Dt:
|
01/19/2016
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Application #:
|
13631645
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Filing Dt:
|
09/28/2012
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|
Publication #:
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Pub Dt:
|
04/03/2014
| | | | |
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Title:
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System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production
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|
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Patent #:
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|
Issue Dt:
|
01/22/2019
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Application #:
|
13645253
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Filing Dt:
|
10/04/2012
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Publication #:
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Pub Dt:
|
04/10/2014
| | | | |
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Title:
|
HARSH ENVIRONMENT OPTICAL ELEMENT PROTECTION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/22/2013
|
Application #:
|
13650261
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Filing Dt:
|
10/12/2012
|
|
Title:
|
INTRACAVITY LOSS ELEMENT FOR POWER AMPLIFIER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/12/2016
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Application #:
|
13652755
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Filing Dt:
|
10/16/2012
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|
Publication #:
|
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Pub Dt:
|
04/17/2014
| | | | |
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Title:
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TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/17/2016
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Application #:
|
13671378
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Filing Dt:
|
11/07/2012
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Publication #:
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Pub Dt:
|
05/08/2014
| | | | |
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Title:
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VIEWPORT PROTECTOR FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
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|
|
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Patent #:
|
|
Issue Dt:
|
09/30/2014
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Application #:
|
13737858
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Filing Dt:
|
01/09/2013
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|
Publication #:
|
|
Pub Dt:
|
12/05/2013
| | | | |
|
Title:
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SYSTEM AND METHOD FOR PROTECTING A SEED LASER IN AN EUV LIGHT SOURCE WITH A BRAGG AOM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/29/2015
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Application #:
|
13747263
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Filing Dt:
|
01/22/2013
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|
Publication #:
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|
Pub Dt:
|
07/24/2014
| | | | |
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Title:
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Thermal Monitor For An Extreme Ultraviolet Light Source
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/29/2014
|
Application #:
|
13830380
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Filing Dt:
|
03/14/2013
|
|
Title:
|
TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2014
|
Application #:
|
13830461
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Filing Dt:
|
03/14/2013
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|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
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Title:
|
TARGET FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET LIGHT SOURCE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/08/2015
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Application #:
|
13830466
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Filing Dt:
|
03/14/2013
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|
Publication #:
|
|
Pub Dt:
|
04/17/2014
| | | | |
|
Title:
|
Active Spectral Control During Spectrum Synthesis
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/07/2014
|
Application #:
|
13830905
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Filing Dt:
|
03/14/2013
|
|
Title:
|
CONTROLLING SPATIAL PROPERTIES IN AN EXCIMER RING AMPLIFIER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/26/2016
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Application #:
|
13840736
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Filing Dt:
|
03/15/2013
|
|
Publication #:
|
|
Pub Dt:
|
12/12/2013
| | | | |
|
Title:
|
CORROSION RESISTANT ELECTRODES FOR LASER CHAMBERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/25/2014
|
Application #:
|
13843626
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Filing Dt:
|
03/15/2013
|
|
Title:
|
EXTREME ULTRAVIOLET LIGHT SOURCE
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|
