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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	017619/0512			Pages:	27
		Recorded:	09/30/2005
Conveyance:	SECURITY AGREEMENT

Total properties: 46

Patent #:	4804007	Issue Dt:	02/14/1989	Application #:	07043852	Filing Dt:	04/29/1987
Title:	CLEANING APPARATUS

Patent #:	4869278	Issue Dt:	09/26/1989	Application #:	07144515	Filing Dt:	01/15/1988
Title:	MEGASONIC CLEANING APPARATUS

Patent #:	4854337	Issue Dt:	08/08/1989	Application #:	07197867	Filing Dt:	05/24/1988
Title:	APPARATUS FOR TREATING WAFERS UTILIZING MEGASONIC ENERGY

Patent #:	4998549	Issue Dt:	03/12/1991	Application #:	07272501	Filing Dt:	11/16/1988
Title:	MEGASONIC CLEANING APPARATUS

Patent #:	5037481	Issue Dt:	08/06/1991	Application #:	07482086	Filing Dt:	02/15/1990
Title:	MEGASONIC CLEANING METHOD

Patent #:	5090432	Issue Dt:	02/25/1992	Application #:	07598426	Filing Dt:	10/16/1990
Title:	SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSING SYSTEM

Patent #:	5148823	Issue Dt:	09/22/1992	Application #:	07598909	Filing Dt:	10/16/1990
Title:	SINGLE CHAMBER MEGASONIC ENERGY CLEANER

Patent #:	5286657	Issue Dt:	02/15/1994	Application #:	07809799	Filing Dt:	12/18/1991
Title:	SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSENG SYSTEM

Patent #:	5365960	Issue Dt:	11/22/1994	Application #:	08042889	Filing Dt:	04/05/1993
Title:	MEGASONIC TRANSDUCER ASSEMBLY

Patent #:	5539995	Issue Dt:	07/30/1996	Application #:	08213599	Filing Dt:	03/16/1994
Title:	CONTINUOUS FLOW VAPOR DRYER SYSTEM

Patent #:	5556479	Issue Dt:	09/17/1996	Application #:	08275807	Filing Dt:	07/15/1994
Title:	METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFERS

Patent #:	5534076	Issue Dt:	07/09/1996	Application #:	08316940	Filing Dt:	10/03/1994
Title:	MEGASONIC CLEANING SYSTEM

Patent #:	5656097	Issue Dt:	08/12/1997	Application #:	08361139	Filing Dt:	12/21/1994
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	6039059	Issue Dt:	03/21/2000	Application #:	08724518	Filing Dt:	09/30/1996
Title:	WAFER CLEANING SYSTEM

Patent #:	5908509	Issue Dt:	06/01/1999	Application #:	08908330	Filing Dt:	08/07/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	5996595	Issue Dt:	12/07/1999	Application #:	08908345	Filing Dt:	08/07/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	5950645	Issue Dt:	09/14/1999	Application #:	08910033	Filing Dt:	08/11/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	6125551	Issue Dt:	10/03/2000	Application #:	09040176	Filing Dt:	03/17/1998
Title:	GAS SEAL AND SUPPORT FOR ROTATING SEMICONDUCTOR PROCESSOR

Patent #:	6140744	Issue Dt:	10/31/2000	Application #:	09057182	Filing Dt:	04/08/1998
Title:	WAFER CLEANING SYSTEM

Patent #:	6122837	Issue Dt:	09/26/2000	Application #:	09103930	Filing Dt:	06/24/1998
Title:	CENTRIFUGAL WAFER PROCESSOR AND METHOD

Patent #:	6158445	Issue Dt:	12/12/2000	Application #:	09358568	Filing Dt:	07/20/1999
Title:	SEMICONDUCTOR WAFER CLEANING METHOD

Patent #:	6295999	Issue Dt:	10/02/2001	Application #:	09643328	Filing Dt:	08/22/2000
Title:	WAFER CLEANING METHOD

Patent #:	6378534	Issue Dt:	04/30/2002	Application #:	09694938	Filing Dt:	10/23/2000
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	6684890	Issue Dt:	02/03/2004	Application #:	09906384	Filing Dt:	07/16/2001
Publication #:	US20030015216	Pub Dt:	01/23/2003
Title:	MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID

Patent #:	6679272	Issue Dt:	01/20/2004	Application #:	09922509	Filing Dt:	08/03/2001
Publication #:	US20030024547	Pub Dt:	02/06/2003
Title:	MEGASONIC PROBE ENERGY ATTENUATOR

Patent #:	6463938	Issue Dt:	10/15/2002	Application #:	09953504	Filing Dt:	09/13/2001
Publication #:	US20020011256	Pub Dt:	01/31/2002
Title:	WAFER CLEANING METHOD

Patent #:	7185661	Issue Dt:	03/06/2007	Application #:	10140029	Filing Dt:	05/06/2002
Publication #:	US20030205238	Pub Dt:	11/06/2003
Title:	RECIPROCATING MEGASONIC PROBE

Patent #:	6754980	Issue Dt:	06/29/2004	Application #:	10171426	Filing Dt:	06/12/2002
Publication #:	US20020185152	Pub Dt:	12/12/2002
Title:	MEGASONIC CLEANER AND DRYER

Patent #:	6923192	Issue Dt:	08/02/2005	Application #:	10171429	Filing Dt:	06/12/2002
Publication #:	US20020185153	Pub Dt:	12/12/2002
Title:	STACKABLE PROCESS CHAMBERS

Patent #:	6928751	Issue Dt:	08/16/2005	Application #:	10171430	Filing Dt:	06/12/2002
Publication #:	US20020185154	Pub Dt:	12/12/2002
Title:	MEGASONIC CLEANER AND DRYER SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	10171431	Filing Dt:	06/12/2002
Publication #:	US20020185155	Pub Dt:	12/12/2002
Title:	Method of applying liquid to a megasonic apparatus for improved cleaning control

Patent #:	NONE	Issue Dt:		Application #:	10171494	Filing Dt:	06/12/2002
Publication #:	US20040020512	Pub Dt:	02/05/2004
Title:	Megasonic cleaner and dryer system

Patent #:	6681782	Issue Dt:	01/27/2004	Application #:	10243463	Filing Dt:	09/12/2002
Publication #:	US20030010357	Pub Dt:	01/16/2003
Title:	WAFER CLEANING

Patent #:	6684891	Issue Dt:	02/03/2004	Application #:	10243486	Filing Dt:	09/12/2002
Publication #:	US20030015218	Pub Dt:	01/23/2003
Title:	WAFER CLEANING

Patent #:	7104268	Issue Dt:	09/12/2006	Application #:	10341425	Filing Dt:	01/10/2003
Publication #:	US20040134514	Pub Dt:	07/15/2004
Title:	MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD

Patent #:	7976718	Issue Dt:	07/12/2011	Application #:	10585229	Filing Dt:	04/20/2007
Publication #:	US20080035609	Pub Dt:	02/14/2008			PCT #:	US0443887
Title:	SYSTEM AND METHOD FOR SELECTIVE ETCHING OF SILICON NITRIDE DURING SUBSTRATE PROCESSING

Patent #:	7770593	Issue Dt:	08/10/2010	Application #:	10596682	Filing Dt:	06/21/2006
Publication #:	US20090107561	Pub Dt:	04/30/2009
Title:	BLEED VALVE

Patent #:	6955727	Issue Dt:	10/18/2005	Application #:	10699042	Filing Dt:	10/31/2003
Publication #:	US20040149308	Pub Dt:	08/05/2004
Title:	SUBSTRATE PROCESS TANK WITH ACOUSTICAL SOURCE TRANSMISSION AND METHOD OF PROCESSING SUBSTRATES

Patent #:	7117876	Issue Dt:	10/10/2006	Application #:	10726774	Filing Dt:	12/03/2003
Publication #:	US20040206371	Pub Dt:	10/21/2004
Title:	METHOD OF CLEANING A SIDE OF A THIN FLAT SUBSTRATE BY APPLYING SONIC ENERGY TO THE OPPOSITE SIDE OF THE SUBSTRATE

Patent #:	7047989	Issue Dt:	05/23/2006	Application #:	10742214	Filing Dt:	12/19/2003
Publication #:	US20040139982	Pub Dt:	07/22/2004
Title:	SONIC-ENERGY CLEANER SYSTEM WITH GASIFIED FLUID

Patent #:	7100304	Issue Dt:	09/05/2006	Application #:	10864927	Filing Dt:	06/10/2004
Publication #:	US20040221473	Pub Dt:	11/11/2004
Title:	MEGASONIC CLEANER AND DRYER

Patent #:	7156111	Issue Dt:	01/02/2007	Application #:	10864929	Filing Dt:	06/10/2004
Publication #:	US20050161059	Pub Dt:	07/28/2005
Title:	MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION

Patent #:	NONE	Issue Dt:		Application #:	10865440	Filing Dt:	06/10/2004
Publication #:	US20040231188	Pub Dt:	11/25/2004
Title:	Megasonic cleaner and dryer

Patent #:	7311847	Issue Dt:	12/25/2007	Application #:	10895511	Filing Dt:	07/20/2004
Publication #:	US20050016929	Pub Dt:	01/27/2005
Title:	SYSTEM AND METHOD FOR POINT-OF-USE FILTRATION AND PURIFICATION OF FLUIDS USED IN SUBSTRATE PROCESSING

Patent #:	NONE	Issue Dt:		Application #:	10931441	Filing Dt:	09/01/2004
Publication #:	US20050051083	Pub Dt:	03/10/2005
Title:	Apparatus for carrying reticles and method of using the same to process reticles

Patent #:	NONE	Issue Dt:		Application #:	11178923	Filing Dt:	07/11/2005
Publication #:	US20060016458	Pub Dt:	01/26/2006
Title:	Reduced pressure irradiation processing method and apparatus

Assignors

AKRION, INC.

Exec Dt:

08/05/2005

GOLDFINGER TECHNOLOGIES, LLC

Exec Dt:

08/05/2005

Assignee

PNC BANK NATIONAL ASSOCIATION

1600 MARKET STREET

PHILADELPHIA, PENNSYLVANIA 19103

Correspondence name and address
	ROBIN WOLT
	C/O CORPORATION SERVICE COMPANY
	80 STATE STREET
	6TH FLOOR
	ALBANY, NY 12207

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