|
Total properties:
20
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/31/1992
|
Application #:
|
07438024
|
Filing Dt:
|
11/20/1989
|
|
Title:
|
WAFER CARRIER HOLDER FOR WAFER CARRIERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/1992
|
Application #:
|
07532572
|
Filing Dt:
|
06/04/1990
|
|
Title:
|
WAFER CARRIER HOLDER FOR WAFER CARRIERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/21/1992
|
Application #:
|
07604510
|
Filing Dt:
|
10/29/1990
|
|
Title:
|
SPARGER PLATE FOR OZONE GAS DIFFUSION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/1993
|
Application #:
|
07791094
|
Filing Dt:
|
11/12/1991
|
|
Title:
|
MEGASONIC CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/1995
|
Application #:
|
08271863
|
Filing Dt:
|
07/07/1994
|
|
Title:
|
HIGH TEMPERATURE CERAMIC NUT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/1997
|
Application #:
|
08277792
|
Filing Dt:
|
07/20/1994
|
|
Title:
|
MEGASONIC CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/1998
|
Application #:
|
08851668
|
Filing Dt:
|
05/06/1997
|
|
Title:
|
INDUSTRIAL ROBOT SAFETY DEVICE THAT SHUTS DOWN OPERATION IN REPONSE TO VARIATION IN TENSION OF A ROPE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2004
|
Application #:
|
10014121
|
Filing Dt:
|
12/11/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/27/2002
| | | | |
|
Title:
|
PARTICLE BARRIER DRAIN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2003
|
Application #:
|
10052823
|
Filing Dt:
|
01/17/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/17/2003
| | | | |
|
Title:
|
SYSTEM FOR REMOVAL OF PHOTORESIST USING SPARGER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/2004
|
Application #:
|
10053364
|
Filing Dt:
|
01/18/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR CHEMICAL INJECTION IN SILICON WAFER PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/2005
|
Application #:
|
10053449
|
Filing Dt:
|
01/17/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/03/2003
| | | | |
|
Title:
|
LOW PROFILE WAFER CARRIER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/2005
|
Application #:
|
10091011
|
Filing Dt:
|
03/04/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/30/2003
| | | | |
|
Title:
|
CLEANING AND DRYING METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/20/2004
|
Application #:
|
10098847
|
Filing Dt:
|
03/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/19/2002
| | | | |
|
Title:
|
DRYING VAPOR GENERATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/2004
|
Application #:
|
10117725
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
CHEMICAL CONCENTRATION CONTROL DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10117739
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/02/2003
| | | | |
|
Title:
|
MEMBRANE DRYER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
|
Application #:
|
10117768
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
PROCESS TANK WITH PRESSURIZED MIST GENERATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/11/2005
|
Application #:
|
10117778
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
NEXTGEN WET PROCESS TANK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2003
|
Application #:
|
10304583
|
Filing Dt:
|
11/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
06/19/2003
| | | | |
|
Title:
|
METHOD OF PROCESSING SUBSTRATES USING PRESSURIZED MIST GENERATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10358636
|
Filing Dt:
|
02/05/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/07/2003
| | | | |
|
Title:
|
CAPILLARY DRYING OF SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2004
|
Application #:
|
10366054
|
Filing Dt:
|
02/13/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/24/2003
| | | | |
|
Title:
|
PROCESS AND APPARATUS FOR REMOVAL OF PHOTORESIST FROM SEMICONDUCTOR WAFERS USING SPRAY NOZZLES
|
|
