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Reel/Frame:020791/0519   Pages: 15
Recorded: 04/11/2008
Attorney Dkt #:Q103891
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
7959310
Issue Dt:
06/14/2011
Application #:
11854621
Filing Dt:
09/13/2007
Publication #:
US20080143981
Pub Dt:
06/19/2008
Title:
OPTICAL ARRANGEMENT AND EUV LITHOGRAPHY DEVICE WITH AT LEAST ONE HEATED OPTICAL ELEMENT, OPERATING METHODS, AND METHODS FOR CLEANING AS WELL AS FOR PROVIDING AN OPTICAL ELEMENT
Assignors
1
EHM, DIRK HEINRICH
Exec Dt:
10/18/2007
2
VAN DE RUNSTRAAT, ANNEMIEKE
Exec Dt:
03/08/2008
3
WOLSCHRIJN, BASTIAAN THEODOOR
Exec Dt:
01/09/2008
4
STORM, ARNOLDUS JAN
Exec Dt:
03/17/2008
5
STEIN, THOMAS
Exec Dt:
10/17/2007
6
MEIJERINK, MARCO G. H.
Exec Dt:
10/17/2007
7
BASTEIN, A. G. TON M.
Exec Dt:
10/25/2007
8
VAN SOEST-VERCAMMEN, ESTHER L. J.
Exec Dt:
10/25/2007
9
KOSTER, NORBERTUS BENEDICTUS
Exec Dt:
10/25/2007
10
GUBBELS, FRITS G. H. M.
Exec Dt:
10/17/2007
11
OPREL, PETER J.
Exec Dt:
10/16/2007
12
NIENOORD, MICHIEL
Exec Dt:
10/23/2007
13
RIEPEN, MICHEL
Exec Dt:
10/18/2007
14
MOORS, JOHANNES HUBERTUS JOSEPHINA
Exec Dt:
04/01/2008
Assignees
1
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
2
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS 5504DR
Correspondence name and address
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVE NW
SUITE 600
WASHINGTON, DC 20037

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