Patent Assignment Details
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| Reel/Frame: | 024687/0524 | |
| Pages: | 3 |
| | Recorded: | 07/14/2010 | | |
| Attorney Dkt #: | P3406 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12836558
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Filing Dt:
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07/14/2010
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Title:
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METHOD AND APPARATUS FOR MEASURING THE SHAPE AND THICKNESS VARIATION OF A WAFER BY TWO SINGLE-SHOT PHASE-SHIFTING INTERFEROMETERS
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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DEBORAH WENOCUR/KLA TENCOR
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4057 AMARANTA AVENUE
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PALO ALTO, CA 94306
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