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NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:026250/0524   Pages: 13
Recorded: 05/10/2011
Attorney Dkt #:758024
Conveyance: FIRST AMENDMENT TO SECURITY AGREEMENT
Total properties: 78
1
Patent #:
6752071
Issue Dt:
06/22/2004
Application #:
10077329
Filing Dt:
02/15/2002
Title:
THICK FILM HEATER FOR A POPCORN POPPER
2
Patent #:
7748344
Issue Dt:
07/06/2010
Application #:
10702368
Filing Dt:
11/06/2003
Publication #:
US20050098117
Pub Dt:
05/12/2005
Title:
SEGMENTED RESONANT ANTENNA FOR RADIO FREQUENCY INDUCTIVELY COUPLED PLASMAS
3
Patent #:
7794663
Issue Dt:
09/14/2010
Application #:
10708251
Filing Dt:
02/19/2004
Publication #:
US20050186680
Pub Dt:
08/25/2005
Title:
METHOD AND SYSTEM FOR DETECTION OF SOLID MATERIALS IN A PLASMA USING AN ELECTROMAGNETIC CIRCUIT
4
Patent #:
7892357
Issue Dt:
02/22/2011
Application #:
10755617
Filing Dt:
01/12/2004
Publication #:
US20050150601
Pub Dt:
07/14/2005
Title:
GAS DISTRIBUTION PLATE ASSEMBLY FOR PLASMA REACTORS
5
Patent #:
7821655
Issue Dt:
10/26/2010
Application #:
11053731
Filing Dt:
02/08/2005
Publication #:
US20060082785
Pub Dt:
04/20/2006
Title:
IN-SITU ABSOLUTE MEASUREMENT PROCESS AND APPARATUS FOR FILM THICKNESS, FILM REMOVAL RATE, AND REMOVAL ENDPOINT PREDICTION
6
Patent #:
7709814
Issue Dt:
05/04/2010
Application #:
11155525
Filing Dt:
06/17/2005
Publication #:
US20060141806
Pub Dt:
06/29/2006
Title:
APPARATUS AND PROCESS FOR TREATING DIELECTRIC MATERIALS
7
Patent #:
7828504
Issue Dt:
11/09/2010
Application #:
11432923
Filing Dt:
05/12/2006
Publication #:
US20070264105
Pub Dt:
11/15/2007
Title:
COMBINATION LOAD LOCK FOR HANDLING WORKPIECES
8
Patent #:
7683348
Issue Dt:
03/23/2010
Application #:
11548295
Filing Dt:
10/11/2006
Publication #:
US20080087846
Pub Dt:
04/17/2008
Title:
SENSOR FOR ION IMPLANTER
9
Patent #:
7751172
Issue Dt:
07/06/2010
Application #:
11582814
Filing Dt:
10/18/2006
Publication #:
US20080100983
Pub Dt:
05/01/2008
Title:
SLIDING WAFER RELEASE GRIPPER / WAFER PEELING GRIPPER
10
Patent #:
7845310
Issue Dt:
12/07/2010
Application #:
11635227
Filing Dt:
12/06/2006
Publication #:
US20080138992
Pub Dt:
06/12/2008
Title:
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES
11
Patent #:
7750320
Issue Dt:
07/06/2010
Application #:
11644623
Filing Dt:
12/22/2006
Publication #:
US20080149857
Pub Dt:
06/26/2008
Title:
SYSTEM AND METHOD FOR TWO-DIMENSIONAL BEAM SCAN ACROSS A WORKPIECE OF AN ION IMPLANTER
12
Patent #:
7789443
Issue Dt:
09/07/2010
Application #:
11687184
Filing Dt:
03/16/2007
Publication #:
US20080224491
Pub Dt:
09/18/2008
Title:
WORKPIECE GRIPPING DEVICE
13
Patent #:
7704872
Issue Dt:
04/27/2010
Application #:
11702465
Filing Dt:
02/05/2007
Publication #:
US20070134935
Pub Dt:
06/14/2007
Title:
ULTRAVIOLET ASSISTED PORE SEALING OF POROUS LOW K DIELECTRIC FILMS
14
Patent #:
7692164
Issue Dt:
04/06/2010
Application #:
11739314
Filing Dt:
04/24/2007
Publication #:
US20080067438
Pub Dt:
03/20/2008
Title:
DOSE UNIFORMITY CORRECTION TECHNIQUE
15
Patent #:
7701230
Issue Dt:
04/20/2010
Application #:
11742178
Filing Dt:
04/30/2007
Publication #:
US20080265866
Pub Dt:
10/30/2008
Title:
METHOD AND SYSTEM FOR ION BEAM PROFILING
16
Patent #:
7696494
Issue Dt:
04/13/2010
Application #:
11757063
Filing Dt:
06/01/2007
Publication #:
US20080067442
Pub Dt:
03/20/2008
Title:
BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
17
Patent #:
7699574
Issue Dt:
04/20/2010
Application #:
11765499
Filing Dt:
06/20/2007
Publication #:
US20070243049
Pub Dt:
10/18/2007
Title:
WORK-PIECE PROCESSING SYSTEM
18
Patent #:
7714406
Issue Dt:
05/11/2010
Application #:
11924166
Filing Dt:
10/25/2007
Publication #:
US20080100984
Pub Dt:
05/01/2008
Title:
LOW-COST ELECTROSTATIC CLAMP WITH FAST DE-CLAMP TIME
19
Patent #:
7705328
Issue Dt:
04/27/2010
Application #:
11932117
Filing Dt:
10/31/2007
Publication #:
US20090108198
Pub Dt:
04/30/2009
Title:
BROAD RIBBON BEAM ION IMPLANTER ARCHITECTURE WITH HIGH MASS-ENERGY CAPABILITY
20
Patent #:
7800083
Issue Dt:
09/21/2010
Application #:
11935738
Filing Dt:
11/06/2007
Publication #:
US20090114815
Pub Dt:
05/07/2009
Title:
PLASMA ELECTRON FLOOD FOR ION BEAM IMPLANTER
21
Patent #:
7728293
Issue Dt:
06/01/2010
Application #:
11947632
Filing Dt:
11/29/2007
Publication #:
US20090140717
Pub Dt:
06/04/2009
Title:
STRUCTURES AND METHODS FOR MEASURING BEAM ANGLE IN AN ION IMPLANTER
22
Patent #:
7888661
Issue Dt:
02/15/2011
Application #:
12030306
Filing Dt:
02/13/2008
Publication #:
US20090200493
Pub Dt:
08/13/2009
Title:
METHODS FOR IN SITU SURFACE TREATMENT IN AN ION IMPLANTATION SYSTEM
23
Patent #:
7915597
Issue Dt:
03/29/2011
Application #:
12050594
Filing Dt:
03/18/2008
Publication #:
US20090236547
Pub Dt:
09/24/2009
Title:
EXTRACTION ELECTRODE SYSTEM FOR HIGH CURRENT ION IMPLANTER
24
Patent #:
7994488
Issue Dt:
08/09/2011
Application #:
12108890
Filing Dt:
04/24/2008
Publication #:
US20090267001
Pub Dt:
10/29/2009
Title:
LOW CONTAMINATION, LOW ENERGY BEAMLINE ARCHITECTURE FOR HIGH CURRENT ION IMPLANTATION
25
Patent #:
9036326
Issue Dt:
05/19/2015
Application #:
12113091
Filing Dt:
04/30/2008
Publication #:
US20090273878
Pub Dt:
11/05/2009
Title:
GAS BEARING ELECTROSTATIC CHUCK
26
Patent #:
7759657
Issue Dt:
07/20/2010
Application #:
12142081
Filing Dt:
06/19/2008
Publication #:
US20090314958
Pub Dt:
12/24/2009
Title:
METHODS FOR IMPLANTING B22HX AND ITS IONIZED LOWER MASS BYPRODUCTS
27
Patent #:
7858955
Issue Dt:
12/28/2010
Application #:
12145713
Filing Dt:
06/25/2008
Publication #:
US20090321657
Pub Dt:
12/31/2009
Title:
SYSTEM AND METHOD OF CONTROLLING BROAD BEAM UNIFORMITY
28
Patent #:
7977628
Issue Dt:
07/12/2011
Application #:
12146122
Filing Dt:
06/25/2008
Publication #:
US20090321632
Pub Dt:
12/31/2009
Title:
SYSTEM AND METHOD FOR REDUCING PARTICLES AND CONTAMINATION BY MATCHING BEAM COMPLEMENTARY APERTURE SHAPES TO BEAM SHAPES
29
Patent #:
7897944
Issue Dt:
03/01/2011
Application #:
12176748
Filing Dt:
07/21/2008
Publication #:
US20100012861
Pub Dt:
01/21/2010
Title:
METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION
30
Patent #:
7750314
Issue Dt:
07/06/2010
Application #:
12183787
Filing Dt:
07/31/2008
Publication #:
US20090032727
Pub Dt:
02/05/2009
Title:
ELEVATED TEMPERATURE RF ION SOURCE
31
Patent #:
7947966
Issue Dt:
05/24/2011
Application #:
12183961
Filing Dt:
07/31/2008
Publication #:
US20090114841
Pub Dt:
05/07/2009
Title:
DOUBLE PLASMA ION SOURCE
32
Patent #:
8193513
Issue Dt:
06/05/2012
Application #:
12184082
Filing Dt:
07/31/2008
Publication #:
US20090032728
Pub Dt:
02/05/2009
Title:
HYBRID ION SOURCE/MULTIMODE ION SOURCE
33
Patent #:
7973290
Issue Dt:
07/05/2011
Application #:
12190736
Filing Dt:
08/13/2008
Publication #:
US20100038553
Pub Dt:
02/18/2010
Title:
SYSTEM AND METHOD OF BEAM ENERGY IDENTIFICATION FOR SINGLE WAFER ION IMPLANTATION
34
Patent #:
NONE
Issue Dt:
Application #:
12212507
Filing Dt:
09/17/2008
Publication #:
US20100065761
Pub Dt:
03/18/2010
Title:
ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION
35
Patent #:
7842931
Issue Dt:
11/30/2010
Application #:
12238265
Filing Dt:
09/25/2008
Publication #:
US20100072402
Pub Dt:
03/25/2010
Title:
EXTRACTION ELECTRODE MANIPULATOR
36
Patent #:
9443698
Issue Dt:
09/13/2016
Application #:
12245866
Filing Dt:
10/06/2008
Publication #:
US20100084576
Pub Dt:
04/08/2010
Title:
HYBRID SCANNING FOR ION IMPLANTATION
37
Patent #:
7952851
Issue Dt:
05/31/2011
Application #:
12262399
Filing Dt:
10/31/2008
Publication #:
US20100110603
Pub Dt:
05/06/2010
Title:
WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS
38
Patent #:
8902560
Issue Dt:
12/02/2014
Application #:
12262990
Filing Dt:
10/31/2008
Publication #:
US20100110604
Pub Dt:
05/06/2010
Title:
ELECTROSTATIC CHUCK GROUND PUNCH
39
Patent #:
NONE
Issue Dt:
Application #:
12275394
Filing Dt:
11/21/2008
Publication #:
US20100130017
Pub Dt:
05/27/2010
Title:
FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS
40
Patent #:
8270142
Issue Dt:
09/18/2012
Application #:
12331619
Filing Dt:
12/10/2008
Publication #:
US20100142113
Pub Dt:
06/10/2010
Title:
DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK
41
Patent #:
8023247
Issue Dt:
09/20/2011
Application #:
12331813
Filing Dt:
12/10/2008
Publication #:
US20100142114
Pub Dt:
06/10/2010
Title:
ELECTROSTATIC CHUCK WITH COMPLIANT COAT
42
Patent #:
8008636
Issue Dt:
08/30/2011
Application #:
12338644
Filing Dt:
12/18/2008
Publication #:
US20100155623
Pub Dt:
06/24/2010
Title:
ION IMPLANTATION WITH DIMINISHED SCANNING FIELD EFFECTS
43
Patent #:
9611540
Issue Dt:
04/04/2017
Application #:
12340936
Filing Dt:
12/22/2008
Publication #:
US20100159153
Pub Dt:
06/24/2010
Title:
ELECTROSTATIC CHUCK SHIELDING MECHANISM
44
Patent #:
8168941
Issue Dt:
05/01/2012
Application #:
12357688
Filing Dt:
01/22/2009
Publication #:
US20100181470
Pub Dt:
07/22/2010
Title:
ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS
45
Patent #:
8237135
Issue Dt:
08/07/2012
Application #:
12357973
Filing Dt:
01/22/2009
Publication #:
US20100181499
Pub Dt:
07/22/2010
Title:
ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION
46
Patent #:
8241425
Issue Dt:
08/14/2012
Application #:
12358788
Filing Dt:
01/23/2009
Publication #:
US20100187447
Pub Dt:
07/29/2010
Title:
NON-CONDENSING THERMOS CHUCK
47
Patent #:
NONE
Issue Dt:
Application #:
12398390
Filing Dt:
03/05/2009
Publication #:
US20090277871
Pub Dt:
11/12/2009
Title:
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTECTIVE LAYER BEFORE AND/OR DURING THE PLASMA MEDIATED ASHING PROCESS
48
Patent #:
8071964
Issue Dt:
12/06/2011
Application #:
12431081
Filing Dt:
04/28/2009
Publication #:
US20090272918
Pub Dt:
11/05/2009
Title:
SYSTEM AND METHOD OF PERFORMING UNIFORM DOSE IMPLANTATION UNDER ADVERSE CONDITIONS
49
Patent #:
7994487
Issue Dt:
08/09/2011
Application #:
12474786
Filing Dt:
05/29/2009
Publication #:
US20090294698
Pub Dt:
12/03/2009
Title:
CONTROL OF PARTICLES ON SEMICONDUCTOR WAFERS WHEN IMPLANTING BORON HYDRIDES
50
Patent #:
8124946
Issue Dt:
02/28/2012
Application #:
12477631
Filing Dt:
06/03/2009
Publication #:
US20090321630
Pub Dt:
12/31/2009
Title:
POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS
51
Patent #:
8227768
Issue Dt:
07/24/2012
Application #:
12487229
Filing Dt:
06/18/2009
Publication #:
US20090321631
Pub Dt:
12/31/2009
Title:
LOW-INERTIA MULTI-AXIS MULTI-DIRECTIONAL MECHANICALLY SCANNED ION IMPLANTATION SYSTEM
52
Patent #:
8071451
Issue Dt:
12/06/2011
Application #:
12511737
Filing Dt:
07/29/2009
Publication #:
US20110027957
Pub Dt:
02/03/2011
Title:
METHOD OF DOPING SEMICONDUCTORS
53
Patent #:
8035080
Issue Dt:
10/11/2011
Application #:
12609912
Filing Dt:
10/30/2009
Publication #:
US20110101213
Pub Dt:
05/05/2011
Title:
METHOD AND SYSTEM FOR INCREASING BEAM CURRENT ABOVE A MAXIMUM ENERGY FOR A CHARGE STATE
54
Patent #:
NONE
Issue Dt:
Application #:
12616662
Filing Dt:
11/11/2009
Publication #:
US20110108058
Pub Dt:
05/12/2011
Title:
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
55
Patent #:
8906195
Issue Dt:
12/09/2014
Application #:
12621136
Filing Dt:
11/18/2009
Publication #:
US20110114115
Pub Dt:
05/19/2011
Title:
TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF
56
Patent #:
NONE
Issue Dt:
Application #:
12631117
Filing Dt:
12/04/2009
Publication #:
US20110136346
Pub Dt:
06/09/2011
Title:
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
57
Patent #:
8153814
Issue Dt:
04/10/2012
Application #:
12685913
Filing Dt:
01/12/2010
Publication #:
US20100197655
Pub Dt:
08/05/2010
Title:
SULFONAMIDE DERIVATIVES
58
Patent #:
NONE
Issue Dt:
Application #:
12694597
Filing Dt:
01/27/2010
Publication #:
US20110180097
Pub Dt:
07/28/2011
Title:
THERMAL ISOLATION ASSEMBLIES FOR WAFER TRANSPORT APPARATUS AND METHODS OF USE THEREOF
59
Patent #:
8080814
Issue Dt:
12/20/2011
Application #:
12717536
Filing Dt:
03/04/2010
Publication #:
US20110215262
Pub Dt:
09/08/2011
Title:
METHOD FOR IMPROVING IMPLANT UNIFORMITY DURING PHOTORESIST OUTGASSING
60
Patent #:
9558980
Issue Dt:
01/31/2017
Application #:
12725508
Filing Dt:
03/17/2010
Publication #:
US20100171044
Pub Dt:
07/08/2010
Title:
Vapor Compression Refridgeration Chuck for Ion Implanters
61
Patent #:
8604418
Issue Dt:
12/10/2013
Application #:
12755081
Filing Dt:
04/06/2010
Publication #:
US20110240889
Pub Dt:
10/06/2011
Title:
IN-VACUUM BEAM DEFINING APERTURE CLEANING FOR PARTICLE REDUCTION
62
Patent #:
8023107
Issue Dt:
09/20/2011
Application #:
12764450
Filing Dt:
04/21/2010
Publication #:
US20110170087
Pub Dt:
07/14/2011
Title:
SYSTEM AND METHOD FOR TRANSITIONING FROM A MISSILE WARNING SYSTEM TO A FINE TRACKING SYSTEM IN A DIRECTIONAL INFRARED COUNTERMEASURES SYSTEM
63
Patent #:
8138484
Issue Dt:
03/20/2012
Application #:
12769226
Filing Dt:
04/28/2010
Publication #:
US20110266456
Pub Dt:
11/03/2011
Title:
MAGNETIC SCANNING SYSTEM WITH IMPROVED EFFICIENCY
64
Patent #:
NONE
Issue Dt:
Application #:
12774037
Filing Dt:
05/05/2010
Publication #:
US20110272567
Pub Dt:
11/10/2011
Title:
Throughput Enhancement for Scanned Beam Ion Implanters
65
Patent #:
8278634
Issue Dt:
10/02/2012
Application #:
12796215
Filing Dt:
06/08/2010
Publication #:
US20100308215
Pub Dt:
12/09/2010
Title:
SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY AND UNIFORMITY
66
Patent #:
9147554
Issue Dt:
09/29/2015
Application #:
12826050
Filing Dt:
06/29/2010
Publication #:
US20110001059
Pub Dt:
01/06/2011
Title:
USE OF BEAM SCANNING TO IMPROVE UNIFORMITY AND PRODUCTIVITY OF A 2D MECHANICAL SCAN IMPLANTATION SYSTEM
67
Patent #:
8242469
Issue Dt:
08/14/2012
Application #:
12835138
Filing Dt:
07/13/2010
Publication #:
US20110012033
Pub Dt:
01/20/2011
Title:
ADJUSTABLE LOUVERED PLASMA ELECTRON FLOOD ENCLOSURE
68
Patent #:
8119413
Issue Dt:
02/21/2012
Application #:
12843175
Filing Dt:
07/26/2010
Publication #:
US20100289510
Pub Dt:
11/18/2010
Title:
METHOD AND SYSTEM FOR DETECTION OF SOLID MATERIALS IN A PLASMA USING AN ELECTROMAGNETIC CIRCUIT
69
Patent #:
NONE
Issue Dt:
Application #:
12844193
Filing Dt:
07/27/2010
Publication #:
US20120024314
Pub Dt:
02/02/2012
Title:
PLASMA MEDIATED ASHING PROCESSES
70
Patent #:
8227773
Issue Dt:
07/24/2012
Application #:
12846313
Filing Dt:
07/29/2010
Publication #:
US20120025107
Pub Dt:
02/02/2012
Title:
VERSATILE BEAM GLITCH DETECTION SYSTEM
71
Patent #:
NONE
Issue Dt:
Application #:
12910096
Filing Dt:
10/22/2010
Publication #:
US20110036500
Pub Dt:
02/17/2011
Title:
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES
72
Patent #:
NONE
Issue Dt:
Application #:
12944407
Filing Dt:
11/11/2010
Publication #:
US20110291022
Pub Dt:
12/01/2011
Title:
Post Implant Wafer Heating Using Light
73
Patent #:
9984855
Issue Dt:
05/29/2018
Application #:
12948309
Filing Dt:
11/17/2010
Publication #:
US20120119113
Pub Dt:
05/17/2012
Title:
Implementation of CO-Gases for Germanium and Boron Ion Implants
74
Patent #:
NONE
Issue Dt:
Application #:
12977269
Filing Dt:
12/23/2010
Publication #:
US20120161037
Pub Dt:
06/28/2012
Title:
Dose Measurement Method using Calorimeter
75
Patent #:
8524584
Issue Dt:
09/03/2013
Application #:
13010397
Filing Dt:
01/20/2011
Publication #:
US20120190181
Pub Dt:
07/26/2012
Title:
CARBON IMPLANTATION PROCESS AND CARBON ION PRECURSOR COMPOSITION
76
Patent #:
8760054
Issue Dt:
06/24/2014
Application #:
13010888
Filing Dt:
01/21/2011
Publication #:
US20120187842
Pub Dt:
07/26/2012
Title:
MICROWAVE PLASMA ELECTRON FLOOD
77
Patent #:
9129778
Issue Dt:
09/08/2015
Application #:
13051713
Filing Dt:
03/18/2011
Publication #:
US20120237696
Pub Dt:
09/20/2012
Title:
FLUID DISTRIBUTION MEMBERS AND/OR ASSEMBLIES
78
Patent #:
8378313
Issue Dt:
02/19/2013
Application #:
13077112
Filing Dt:
03/31/2011
Publication #:
US20120248326
Pub Dt:
10/04/2012
Title:
UNIFORMITY OF A SCANNED ION BEAM
Assignor
1
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
04/25/2011
Assignee
1
SILICON VALLEY BANK
275 GROVE STREET
SUITE 2-200
NEWTON, MASSACHUSETTS 02466
Correspondence name and address
CORPORATION SERVICE CO. J. PATERSON
1090 VERMONT AVENUE NW, SUITE 430
WASHINGTON, DC 20005

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