Patent Assignment Details
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| Reel/Frame: | 009226/0529 | |
| Pages: | 4 |
| | Recorded: | 05/28/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09086105
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Filing Dt:
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05/28/1998
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Publication #:
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Pub Dt:
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05/24/2001
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Title:
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METHOD AND APPARATUS FOR INCREASING WAFER THROUGHPUT BETWEEN CLEANINGS IN SEMICONDUCTOR PROCESSING REACTORS
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Assignee
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| 2201 S. MCDOWELL BOULEVARD |
| PETALUMA, CALIFORNIA 94955 |
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Correspondence name and address
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FLIESLER, DUBB, MEYER & LOVEJOY
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SHELDON R. MEYER
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FOUR EMBARCADERO CENTER, SUITE 400
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SAN FRANCISCO, CA 94111
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