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Reel/Frame:032427/0529   Pages: 23
Recorded: 03/13/2014
Attorney Dkt #:BATCH 11 TO LLC
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 23
1
Patent #:
7741626
Issue Dt:
06/22/2010
Application #:
12210012
Filing Dt:
09/12/2008
Publication #:
US20100066989
Pub Dt:
03/18/2010
Title:
SPECTRAL PURITY FILTERS AND METHODS THEREFOR
2
Patent #:
8198612
Issue Dt:
06/12/2012
Application #:
12221313
Filing Dt:
07/31/2008
Publication #:
US20100025600
Pub Dt:
02/04/2010
Title:
SYSTEMS AND METHODS FOR HEATING AN EUV COLLECTOR MIRROR
3
Patent #:
7756171
Issue Dt:
07/13/2010
Application #:
12255347
Filing Dt:
10/21/2008
Publication #:
US20100098122
Pub Dt:
04/22/2010
Title:
METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
4
Patent #:
7720120
Issue Dt:
05/18/2010
Application #:
12255367
Filing Dt:
10/21/2008
Publication #:
US20100098123
Pub Dt:
04/22/2010
Title:
METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
5
Patent #:
7751453
Issue Dt:
07/06/2010
Application #:
12255385
Filing Dt:
10/21/2008
Publication #:
US20100098124
Pub Dt:
04/22/2010
Title:
METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
6
Patent #:
7819945
Issue Dt:
10/26/2010
Application #:
12261737
Filing Dt:
10/30/2008
Publication #:
US20100107870
Pub Dt:
05/06/2010
Title:
METAL FLUORIDE TRAP
7
Patent #:
9018561
Issue Dt:
04/28/2015
Application #:
12284031
Filing Dt:
09/17/2008
Publication #:
US20090116530
Pub Dt:
05/07/2009
Title:
HIGH POWER SEED/AMPLIFIER LASER SYSTEM WITH BEAM SHAPING INTERMEDIATE THE SEED AND AMPLIFIER
8
Patent #:
7641349
Issue Dt:
01/05/2010
Application #:
12284585
Filing Dt:
09/22/2008
Title:
SYSTEMS AND METHODS FOR COLLECTOR MIRROR TEMPERATURE CONTROL USING DIRECT CONTACT HEAT TRANSFER
9
Patent #:
8969838
Issue Dt:
03/03/2015
Application #:
12460762
Filing Dt:
07/23/2009
Publication #:
US20100258747
Pub Dt:
10/14/2010
Title:
SYSTEMS AND METHODS FOR PROTECTING AN EUV LIGHT SOURCE CHAMBER FROM HIGH PRESSURE SOURCE MATERIAL LEAKS
10
Patent #:
8283643
Issue Dt:
10/09/2012
Application #:
12592107
Filing Dt:
11/18/2009
Publication #:
US20100127191
Pub Dt:
05/27/2010
Title:
SYSTEMS AND METHODS FOR DRIVE LASER BEAM DELIVERY IN AN EUV LIGHT SOURCE
11
Patent #:
7995637
Issue Dt:
08/09/2011
Application #:
12603486
Filing Dt:
10/21/2009
Publication #:
US20100142582
Pub Dt:
06/10/2010
Title:
GAS DISCHARGE LASER CHAMBER
12
Patent #:
8144739
Issue Dt:
03/27/2012
Application #:
12605306
Filing Dt:
10/23/2009
Publication #:
US20100149647
Pub Dt:
06/17/2010
Title:
SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH
13
Patent #:
8254420
Issue Dt:
08/28/2012
Application #:
12620967
Filing Dt:
11/18/2009
Publication #:
US20110116522
Pub Dt:
05/19/2011
Title:
ADVANCED LASER WAVELENGTH CONTROL
14
Patent #:
8000212
Issue Dt:
08/16/2011
Application #:
12637961
Filing Dt:
12/15/2009
Publication #:
US20110141865
Pub Dt:
06/16/2011
Title:
METROLOGY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
15
Patent #:
8304752
Issue Dt:
11/06/2012
Application #:
12638413
Filing Dt:
12/15/2009
Publication #:
US20100327192
Pub Dt:
12/30/2010
Title:
EUV LIGHT PRODUCING SYSTEM AND METHOD UTILIZING AN ALIGNMENT LASER
16
Patent #:
8138487
Issue Dt:
03/20/2012
Application #:
12720190
Filing Dt:
03/09/2010
Publication #:
US20100258748
Pub Dt:
10/14/2010
Title:
SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER
17
Patent #:
8158960
Issue Dt:
04/17/2012
Application #:
12721317
Filing Dt:
03/10/2010
Publication #:
US20100294953
Pub Dt:
11/25/2010
Title:
LASER PRODUCED PLASMA EUV LIGHT SOURCE
18
Patent #:
8014432
Issue Dt:
09/06/2011
Application #:
12724681
Filing Dt:
03/16/2010
Publication #:
US20110069733
Pub Dt:
03/24/2011
Title:
REGENERATIVE RING RESONATOR
19
Patent #:
8575575
Issue Dt:
11/05/2013
Application #:
12725167
Filing Dt:
03/16/2010
Publication #:
US20100258749
Pub Dt:
10/14/2010
Title:
SYSTEM, METHOD AND APPARATUS FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET CHAMBER WITH HOT WALLS AND COLD COLLECTOR MIRROR
20
Patent #:
8653491
Issue Dt:
02/18/2014
Application #:
12725178
Filing Dt:
03/16/2010
Publication #:
US20100258750
Pub Dt:
10/14/2010
Title:
SYSTEM, METHOD AND APPARATUS FOR ALIGNING AND SYNCHRONIZING TARGET MATERIAL FOR OPTIMUM EXTREME ULTRAVIOLET LIGHT OUTPUT
21
Patent #:
8295316
Issue Dt:
10/23/2012
Application #:
12730506
Filing Dt:
03/24/2010
Publication #:
US20110235663
Pub Dt:
09/29/2011
Title:
METHOD AND SYSTEM FOR MANAGING LIGHT SOURCE OPERATION
22
Patent #:
9073098
Issue Dt:
07/07/2015
Application #:
13473529
Filing Dt:
05/16/2012
Publication #:
US20130306110
Pub Dt:
11/21/2013
Title:
Light Collector Mirror Cleaning
23
Patent #:
RE45249
Issue Dt:
11/18/2014
Application #:
13778006
Filing Dt:
02/26/2013
Title:
System Method and Apparatus for Selecting and Controlling Light Source Bandwidth
Assignor
1
CYMER, INC.
Exec Dt:
05/30/2013
Assignee
1
CYMER, LLC
17075 THORNMINT COURT
INTELLECTUAL PROP DEPT MS/4-2D
SAN DIEGO, CALIFORNIA 92127
Correspondence name and address
JEFFREY J BROOKS
17075 THORNMINT COURT
INTELLECTUAL PROP DEPT MS/4-2D
SAN DIEGO, CA 92127

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