Patent Assignment Details
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Reel/Frame: | 016890/0531 | |
| Pages: | 4 |
| | Recorded: | 10/17/2005 | | |
Conveyance: | CORRECTIVE ASSIGNMENT CORRECTION OF ASSIGNMENT RECORDED ON AUGUST 16, 2005 AT REEL 016640 FRAME 0557 |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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11174103
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Filing Dt:
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07/01/2005
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Publication #:
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Pub Dt:
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01/05/2006
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Title:
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METHOD AND APPARATUS FOR IMMERSION LITHOGRAPHY
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Assignee
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KAPELDREEF 75 |
LEUVEN, BELGIUM 3001 |
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Correspondence name and address
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LISA M. SCHOEDEL
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MCDONNELL BOEHNEN HULBERT, ET AL.
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300 SOUTH WACKER DRIVE
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CHICAGO, IL 60606
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