Patent Assignment Details
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Reel/Frame: | 036822/0533 | |
| Pages: | 23 |
| | Recorded: | 10/09/2015 | | |
Attorney Dkt #: | 023293 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14867442
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Filing Dt:
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09/28/2015
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Publication #:
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Pub Dt:
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03/30/2017
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Title:
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IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS HAVING VARIED GEOMETRIES
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Assignee
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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KACVINSKY DAISAK BLUNI PLLC
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3120 PRINCETON PIKE, SUITE 303
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LAWRENCEVILLE, NJ 08648
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