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Patent #:
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Issue Dt:
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04/25/1989
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Application #:
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07189780
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Filing Dt:
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05/03/1988
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Title:
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CAPACITANCE MANOMETER HAVING STRESS RELIEF FOR FIXED ELECTRODE
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Patent #:
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Issue Dt:
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06/02/1992
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Application #:
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07701200
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Filing Dt:
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05/16/1991
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Title:
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BUTTERFLY VALVE HAVING IMPROVED SEALING CHARACTERISTICS
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Patent #:
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Issue Dt:
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06/15/1993
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Application #:
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07872350
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Filing Dt:
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04/23/1992
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Title:
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REGULATOR FLOW CONTROL
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Patent #:
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Issue Dt:
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03/09/1993
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Application #:
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07912007
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Filing Dt:
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07/10/1992
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Title:
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FLUID MASS FLOW METER DEVICE WITH REDUCED ATTITUDE SENSITIVITY
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Patent #:
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Issue Dt:
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01/18/1994
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Application #:
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07947889
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Filing Dt:
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09/18/1992
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Title:
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THERMAL MASS FLOW SENSOR
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Patent #:
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Issue Dt:
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05/09/1995
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Application #:
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08078365
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Filing Dt:
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06/16/1993
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Title:
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THROTTLE VALVE
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Patent #:
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Issue Dt:
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03/14/1995
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Application #:
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08088317
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Filing Dt:
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07/07/1993
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Title:
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DUAL BALANCED CAPACITANCE MANOMETERS FOR SUPPRESSING VIBRATION EFFECTS
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08365861
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Filing Dt:
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12/29/1994
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Title:
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FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08557378
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Filing Dt:
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11/13/1995
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Title:
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APPARATUS FOR HANDLING PROCESS FLUID
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08649056
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Filing Dt:
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05/16/1996
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Title:
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QUICK DISCONNECT VALVE SYSTEM FOR ABRASIVE SLURRIES
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Patent #:
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Issue Dt:
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07/28/1998
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Application #:
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08682170
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Filing Dt:
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07/16/1996
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Title:
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VALVE MECHANISM
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Patent #:
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Issue Dt:
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12/22/1998
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Application #:
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08685260
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Filing Dt:
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07/23/1996
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Title:
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FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD
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Patent #:
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Issue Dt:
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06/16/1998
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Application #:
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08685322
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Filing Dt:
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07/23/1996
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Title:
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METHOD OF MAKING A FLOW CONTROLLER
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08691061
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Filing Dt:
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08/01/1996
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Title:
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FLUID FLOW METER WITH REDUCED ORIENTATION SENSITIVITY
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Patent #:
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Issue Dt:
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11/30/1999
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Application #:
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08739936
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Filing Dt:
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10/30/1996
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Title:
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GAS PANEL
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Patent #:
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Issue Dt:
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01/26/1999
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Application #:
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08753773
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Filing Dt:
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11/29/1996
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Title:
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UNIQUE STRAIN RELIEF JUNCTION
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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08753790
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Filing Dt:
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11/29/1996
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Title:
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SHIELDING UNIQUE FOR FILTERING RFI AND EFI INTERFERENCE SIGNALS FROM THE MEASURING ELEMENTS
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Patent #:
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Issue Dt:
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03/24/1998
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Application #:
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08758971
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Filing Dt:
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12/02/1996
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Title:
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MASS FLOW CONTROLLER WITH VERTICAL PURIFIER
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Patent #:
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Issue Dt:
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11/17/1998
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Application #:
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08760150
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Filing Dt:
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12/03/1996
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Title:
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BUILDING BLOCKS FOR INTEGRATED GAS PANEL
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Patent #:
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Issue Dt:
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04/04/2000
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Application #:
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08815323
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Filing Dt:
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03/10/1997
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Title:
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THERMAL MASS FLOW CONTROLLER HAVING ORTHOGONAL THERMAL MASS FLOW SENSOR
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Patent #:
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Issue Dt:
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05/11/1999
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Application #:
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08860343
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Filing Dt:
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10/02/1997
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Title:
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FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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08893773
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Filing Dt:
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07/11/1997
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Title:
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MOUNTING PLANE FOR INTEGRATED GAS PANEL
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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08931060
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Filing Dt:
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09/15/1997
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Title:
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BUILDING BLOCKS FOR INTEGRATED GAS PANEL
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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08934819
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Filing Dt:
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09/22/1997
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Title:
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APPARATUS AND METHOD FOR HOMOGENEOUS MIXING OF A SOLUTION
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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08960464
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Filing Dt:
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10/29/1997
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Title:
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GAS PANEL
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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08965077
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Filing Dt:
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11/06/1997
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Title:
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GAS HANDLING DEVICE
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09060519
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Filing Dt:
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04/14/1998
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Title:
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SIEVE LIKE STRUCTURE FOR FLUID FLOW THROUGH STRUCTURAL ARRANGEMENT
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09111999
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Filing Dt:
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07/08/1998
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Title:
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MANIFOLD SYSTEM FOR ENABLING A DISTRIBUTION OF FLUIDS
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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09150458
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Filing Dt:
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09/09/1998
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Title:
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COMPONENT HEATER FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09229722
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Filing Dt:
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01/13/1999
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Title:
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MANIFOLD SYSTEM OF REMOVABLE COMPONENTS FOR DISTRIBUTION OF FLUIDS
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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09239224
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Filing Dt:
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01/29/1999
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Title:
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LAMINATED PADDLE HEATER AND BRAZING PROCESS
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09291468
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Filing Dt:
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04/14/1999
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Title:
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METHOD OF MAKING THIN FILM PIEZORESISTIVE SENSOR
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09350744
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Filing Dt:
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07/09/1999
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Title:
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SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09350746
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Filing Dt:
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07/09/1999
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Title:
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MASS FLOW SENSOR INTERFACE CIRCUIT
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09350747
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07/09/1999
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Title:
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SYSTEM AND METHOD FOR SENSOR RESPONSE LINEARIZATION
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Patent #:
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09/03/2002
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09351098
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07/10/1999
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Title:
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SYSTEM AND METHOD FOR A VARIABLE GAIN PROPORTIONAL-INTEGRAL (PI) CONTROLLER
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Patent #:
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06/11/2002
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09351111
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07/10/1999
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05/14/2002
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09351120
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07/10/1999
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Title:
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SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER
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02/27/2001
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09371408
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08/10/1999
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Title:
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GAS PANEL
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02/20/2001
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09371655
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08/10/1999
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Title:
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GAS PANEL
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11/07/2000
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09371659
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08/10/1999
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GAS PANEL
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10/03/2000
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09398302
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09/20/1999
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WELDED INTERCONNECTION MODULES FOR HIGH PURITY FLUID FLOW CONTROL APPLICATIONS
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09/04/2001
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12/06/1999
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07/30/2002
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09616819
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07/12/2000
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03/25/2003
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09635288
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08/09/2000
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11/05/2002
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09732434
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12/07/2000
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02/21/2002
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GAS PANEL
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04/01/2003
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09783439
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02/14/2001
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12/20/2001
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08/02/2005
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07/31/2001
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04/25/2002
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08/20/2002
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08/23/2001
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04/25/2002
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GAS PANEL
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02/28/2006
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09/12/2001
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09/09/2003
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09/24/2001
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01/31/2002
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01/27/2004
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12/06/2001
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10/03/2002
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SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER
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12/09/2003
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11/05/2001
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04/04/2002
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SYSTEM AND METHOD FOR INTEGRATING GAS COMPONENTS
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03/30/2004
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01/31/2002
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08/22/2002
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SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER
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06/28/2005
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05/31/2002
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12/04/2003
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05/11/2004
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06/13/2002
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03/09/2004
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06/13/2002
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12/18/2003
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11/04/2003
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02/05/2002
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08/29/2002
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11/08/2005
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04/24/2002
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12/26/2002
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03/08/2005
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04/26/2002
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10/31/2002
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08/03/2004
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05/16/2002
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12/26/2002
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06/22/2004
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05/23/2002
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12/05/2002
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02/21/2006
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06/24/2002
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12/25/2003
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VARIABLE CAPACITANCE MEASURING DEVICE
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01/04/2005
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10228612
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08/27/2002
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12/25/2003
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VARIABLE CAPACITANCE MEASURING DEVICE COMPRISING A GLASS-CERAMIC INSULATOR
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03/15/2011
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10343360
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09/17/2003
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03/25/2004
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05/09/2006
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03/26/2003
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10/14/2004
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06/27/2006
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04/14/2003
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04/15/2004
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07/10/2007
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05/23/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION
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Patent #:
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Issue Dt:
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11/15/2005
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Application #:
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10468413
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Filing Dt:
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08/19/2003
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Publication #:
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Pub Dt:
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04/29/2004
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Title:
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VACUUM SENSOR
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10515328
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Filing Dt:
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11/22/2004
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Publication #:
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Pub Dt:
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11/03/2005
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Title:
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SLOTTED FLOW RESTRICTOR FOR A MASS FLOW METER
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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10622004
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Filing Dt:
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07/16/2003
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Publication #:
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Pub Dt:
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05/27/2004
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Title:
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VARIABLE RESISTANCE SENSOR WITH COMMON REFERENCE LEG
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10622080
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Filing Dt:
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07/17/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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10623137
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Filing Dt:
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07/18/2003
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Publication #:
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Pub Dt:
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05/27/2004
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Title:
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METHOD AND APPARATUS FOR BLENDING PROCESS MATERIALS
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10623147
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Filing Dt:
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07/18/2003
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Publication #:
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Pub Dt:
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07/01/2004
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Title:
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FLOW SENSOR
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Patent #:
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Issue Dt:
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02/26/2008
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Application #:
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10650102
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Filing Dt:
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08/26/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Title:
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MODULAR SUBSTRATE GAS PANEL HAVING MANIFOLD CONNECTIONS IN A COMMON PLANE
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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10827026
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Filing Dt:
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04/19/2004
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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PRESSURE SENSOR DEVICE AND METHOD
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10832949
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Filing Dt:
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04/27/2004
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Publication #:
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Pub Dt:
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10/14/2004
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Title:
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METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS
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Patent #:
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Issue Dt:
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03/14/2006
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Application #:
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10848739
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Filing Dt:
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05/19/2004
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Publication #:
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Pub Dt:
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01/20/2005
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Title:
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METHOD FOR DIGITALLY CONTROLLING A SENSOR SYSTEM
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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10878974
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Filing Dt:
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06/28/2004
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Publication #:
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Pub Dt:
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12/29/2005
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Title:
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ULTRASONIC LIQUID FLOW CONTROLLER
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Patent #:
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Issue Dt:
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05/08/2007
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Application #:
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10886836
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Filing Dt:
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07/08/2004
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Publication #:
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Pub Dt:
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12/29/2005
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Title:
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METHOD AND SYSTEM FOR A MASS FLOW CONTROLLER WITH REDUCED PRESSURE SENSITIVITY
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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10887040
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Filing Dt:
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07/08/2004
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Publication #:
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Pub Dt:
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01/12/2006
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Title:
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VALVE CONTROL SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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05/22/2007
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Application #:
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10887048
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Filing Dt:
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07/08/2004
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Publication #:
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Pub Dt:
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01/12/2006
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Title:
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ATTITUDE INSENSITIVE FLOW DEVICE SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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08/19/2008
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Application #:
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10887591
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Filing Dt:
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07/09/2004
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Publication #:
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Pub Dt:
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01/12/2006
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Title:
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METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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10926860
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Filing Dt:
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08/26/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Title:
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SYSTEM AND METHOD FOR FILTERING OUTPUT IN MASS FLOW CONTROLLERS AND MASS FLOW METERS
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Patent #:
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Issue Dt:
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09/16/2008
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Application #:
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10946031
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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01/19/2006
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Title:
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METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10952508
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Filing Dt:
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09/28/2004
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Publication #:
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Pub Dt:
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02/24/2005
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Title:
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VARIABLE CAPACITANCE MEASURING DEVICE
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Patent #:
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Issue Dt:
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08/01/2006
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Application #:
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10978156
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Filing Dt:
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10/29/2004
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Publication #:
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Pub Dt:
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05/05/2005
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Title:
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VARIABLE RESISTANCE SENSOR WITH COMMON REFERENCE LEG
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10981856
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Filing Dt:
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11/05/2004
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Publication #:
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Pub Dt:
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05/26/2005
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Title:
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SURFACE MOUNT HEATER
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10996023
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Filing Dt:
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11/23/2004
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Publication #:
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Pub Dt:
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04/28/2005
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Title:
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VARIABLE CAPACITANCE MEASURING DEVICE COMPRISING A GLASS-CERAMIC INSULATOR
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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11012750
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Filing Dt:
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12/15/2004
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Publication #:
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Pub Dt:
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06/15/2006
| | | | |
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Title:
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SYSTEM AND METHOD FOR MEASURING FLOW
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Patent #:
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Issue Dt:
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09/18/2007
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Application #:
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11051209
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Filing Dt:
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02/04/2005
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Publication #:
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Pub Dt:
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06/16/2005
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Title:
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FLOW SENSOR SIGNAL CONVERSION
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Patent #:
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Issue Dt:
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06/19/2007
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Application #:
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11091824
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Filing Dt:
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03/28/2005
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Publication #:
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Pub Dt:
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08/04/2005
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Title:
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SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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11092144
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Filing Dt:
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03/29/2005
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Publication #:
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Pub Dt:
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08/04/2005
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Title:
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SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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04/22/2008
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Application #:
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11129166
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Filing Dt:
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05/13/2005
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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11148053
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Filing Dt:
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06/08/2005
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Publication #:
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Pub Dt:
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10/13/2005
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Title:
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METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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12/05/2006
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Application #:
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11174753
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Filing Dt:
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07/05/2005
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Publication #:
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Pub Dt:
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11/03/2005
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Title:
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METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS
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Patent #:
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Issue Dt:
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06/05/2007
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Application #:
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11232031
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Filing Dt:
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09/21/2005
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Publication #:
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Pub Dt:
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01/19/2006
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Title:
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MODULAR SUBSTRATE GAS PANEL HAVING MANIFOLD CONNECTIONS IN A COMMON PLANE
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Patent #:
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Issue Dt:
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05/18/2010
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Application #:
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11321238
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Filing Dt:
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12/29/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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DIGITALLY CONTROLLED SENSOR SYSTEM
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Patent #:
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Issue Dt:
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10/30/2007
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Application #:
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11341826
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Filing Dt:
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01/27/2006
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Pub Dt:
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06/15/2006
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Title:
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SYSTEM AND METHOD FOR MEASURING FLOW
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11349068
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02/07/2006
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Pub Dt:
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08/09/2007
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Title:
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SYSTEM AND METHOD FOR PRODUCING AND DELIVERING VAPOR
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