Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 040638/0541 | |
| Pages: | 2 |
| | Recorded: | 12/15/2016 | | |
| Attorney Dkt #: | 075113-004000 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15380979
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Filing Dt:
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12/15/2016
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Publication #:
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Pub Dt:
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06/29/2017
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Title:
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MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD, AND ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS APPLY THEREOF
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Assignee
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| 188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG |
| SHANGHAI, CHINA 201201 |
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Correspondence name and address
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NIXON PEABODY LLP
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P.O. BOX 60610
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PALO ALTO, CA 94306
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