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Reel/Frame:032911/0555   Pages: 15
Recorded: 05/16/2014
Attorney Dkt #:EUV - BATCH 5
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 23
1
Patent #:
8604452
Issue Dt:
12/10/2013
Application #:
13050198
Filing Dt:
03/17/2011
Publication #:
US20120235066
Pub Dt:
09/20/2012
Title:
DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE
2
Patent #:
8513629
Issue Dt:
08/20/2013
Application #:
13107804
Filing Dt:
05/13/2011
Publication #:
US20120286176
Pub Dt:
11/15/2012
Title:
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
3
Patent #:
9279445
Issue Dt:
03/08/2016
Application #:
13328628
Filing Dt:
12/16/2011
Publication #:
US20130153792
Pub Dt:
06/20/2013
Title:
DROPLET GENERATOR STEERING SYSTEM
4
Patent #:
8816305
Issue Dt:
08/26/2014
Application #:
13330884
Filing Dt:
12/20/2011
Publication #:
US20130153603
Pub Dt:
06/20/2013
Title:
FILTER FOR MATERIAL SUPPLY APPARATUS
5
Patent #:
8530871
Issue Dt:
09/10/2013
Application #:
13445195
Filing Dt:
04/12/2012
Publication #:
US20120228526
Pub Dt:
09/13/2012
Title:
LASER PRODUCED PLASMA EUV LIGHT SOURCE
6
Patent #:
8681427
Issue Dt:
03/25/2014
Application #:
13535148
Filing Dt:
06/27/2012
Publication #:
US20130321926
Pub Dt:
12/05/2013
Title:
SYSTEM AND METHOD FOR SEPARATING A MAIN PULSE AND A PRE-PULSE BEAM FROM A LASER SOURCE
7
Patent #:
8598552
Issue Dt:
12/03/2013
Application #:
13549261
Filing Dt:
07/13/2012
Publication #:
US20130320244
Pub Dt:
12/05/2013
Title:
SYSTEM AND METHOD TO OPTIMIZE EXTREME ULTRAVIOLET LIGHT GENERATION
8
Patent #:
8811440
Issue Dt:
08/19/2014
Application #:
13607623
Filing Dt:
09/07/2012
Publication #:
US20140072006
Pub Dt:
03/13/2014
Title:
SYSTEM AND METHOD FOR SEED LASER MODE STABILIZATION
9
Patent #:
9238243
Issue Dt:
01/19/2016
Application #:
13631645
Filing Dt:
09/28/2012
Publication #:
US20140091239
Pub Dt:
04/03/2014
Title:
System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production
10
Patent #:
10185234
Issue Dt:
01/22/2019
Application #:
13645253
Filing Dt:
10/04/2012
Publication #:
US20140098413
Pub Dt:
04/10/2014
Title:
HARSH ENVIRONMENT OPTICAL ELEMENT PROTECTION
11
Patent #:
NONE
Issue Dt:
Application #:
13650778
Filing Dt:
10/12/2012
Publication #:
US20140102881
Pub Dt:
04/17/2014
Title:
METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC
12
Patent #:
9392678
Issue Dt:
07/12/2016
Application #:
13652755
Filing Dt:
10/16/2012
Publication #:
US20140102875
Pub Dt:
04/17/2014
Title:
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
13
Patent #:
9341752
Issue Dt:
05/17/2016
Application #:
13671378
Filing Dt:
11/07/2012
Publication #:
US20140126043
Pub Dt:
05/08/2014
Title:
VIEWPORT PROTECTOR FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
14
Patent #:
8848277
Issue Dt:
09/30/2014
Application #:
13737858
Filing Dt:
01/09/2013
Publication #:
US20130322482
Pub Dt:
12/05/2013
Title:
SYSTEM AND METHOD FOR PROTECTING A SEED LASER IN AN EUV LIGHT SOURCE WITH A BRAGG AOM
15
Patent #:
9148941
Issue Dt:
09/29/2015
Application #:
13747263
Filing Dt:
01/22/2013
Publication #:
US20140203195
Pub Dt:
07/24/2014
Title:
Thermal Monitor For An Extreme Ultraviolet Light Source
16
Patent #:
8872143
Issue Dt:
10/28/2014
Application #:
13830461
Filing Dt:
03/14/2013
Publication #:
US20140264087
Pub Dt:
09/18/2014
Title:
TARGET FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET LIGHT SOURCE
17
Patent #:
9127981
Issue Dt:
09/08/2015
Application #:
13960090
Filing Dt:
08/06/2013
Publication #:
US20150041659
Pub Dt:
02/12/2015
Title:
System and Method for Return Beam Metrology with Optical Switch
18
Patent #:
9280053
Issue Dt:
03/08/2016
Application #:
14017882
Filing Dt:
09/04/2013
Publication #:
US20150062544
Pub Dt:
03/05/2015
Title:
APPARATUS FOR AND METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER FOCUSING SYSTEM FOR EUV LPP SOURCE
19
Patent #:
8901523
Issue Dt:
12/02/2014
Application #:
14017981
Filing Dt:
09/04/2013
Title:
APPARATUS FOR PROTECTING EUV OPTICAL ELEMENTS
20
Patent #:
8872144
Issue Dt:
10/28/2014
Application #:
14035847
Filing Dt:
09/24/2013
Title:
SYSTEM AND METHOD FOR LASER BEAM FOCUS CONTROL FOR EXTREME ULTRAVIOLET LASER PRODUCED PLASMA SOURCE
21
Patent #:
9360600
Issue Dt:
06/07/2016
Application #:
14085664
Filing Dt:
11/20/2013
Publication #:
US20150137011
Pub Dt:
05/21/2015
Title:
System and Method for Correcting the Focus of a Laser Beam
22
Patent #:
8829478
Issue Dt:
09/09/2014
Application #:
14087346
Filing Dt:
11/22/2013
Publication #:
US20140077104
Pub Dt:
03/20/2014
Title:
DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE
23
Patent #:
9699876
Issue Dt:
07/04/2017
Application #:
14151600
Filing Dt:
01/09/2014
Publication #:
US20140261761
Pub Dt:
09/18/2014
Title:
METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL
Assignor
1
CYMER, LLC
Exec Dt:
01/06/2014
Assignee
1
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondence name and address
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, 5500 AH NETHERLANDS

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