Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 007520/0558 | |
| Pages: | 2 |
| | Recorded: | 06/07/1995 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/1997
|
Application #:
|
08484020
|
Filing Dt:
|
06/07/1995
|
|
Title:
|
SINGLE CRYSTAL SILICON DRY-ETCH ENDPOINT BASED ON DOPANT-DEPENDENT AND THERMALLY-ASSISTED ETCH RATES
|
|
|
Assignee
|
|
|
|
|
| 2800 OLD SHAKOPEE ROAD |
| BLOOMINGTON, MINNESOTA 55425 |
|
|
Correspondence name and address
|
| |
KINNEY & LANGE, P.A.
|
| |
MICHAEL R. BINZAK
|
| |
625 FOURTH AVENUE SOUTH
|
| |
SUITE 1500
|
| |
MINNEAPOLIS, MINNESOTA 55415-1659
|
Search Results as of:
06/14/2024 11:13 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
