Patent Assignment Details
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Reel/Frame: | 016763/0558 | |
| Pages: | 5 |
| | Recorded: | 11/10/2005 | | |
Attorney Dkt #: | SSF:JLA 8503-002 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11135721
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Filing Dt:
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05/24/2005
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Publication #:
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Pub Dt:
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03/30/2006
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Title:
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Method and system for contamination detection and monitoring a lithographic exposure tool and operating method for the same under controlled atmospheric conditions
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Assignee
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C/O AMORY BUILDING, VICTORIA ROAD |
BASSETERRE, SAINT KITTS AND NEVIS |
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Correspondence name and address
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STEPHEN S. FORD
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210 SW MORRISON STREET
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SUITE 400
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PORTLAND, OR 97204
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