Patent Assignment Details
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| Reel/Frame: | 017505/0559 | |
| Pages: | 3 |
| | Recorded: | 01/27/2006 | | |
| Attorney Dkt #: | 02887-0362 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/04/2007
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Application #:
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11260251
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Filing Dt:
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10/28/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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CHARGED BEAM EXPOSURE APPARATUS, CHARGED BEAM CONTROL METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Assignee
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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MR. ERNEST F. CHAPMAN
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FINNEGAN, HENDERSON, FARABOW, ET AL
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901 NEW YORK AVENUE, NW
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WASHINGTON, D.C. 20001-4413
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