Patent Assignment Details
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| Reel/Frame: | 012857/0560 | |
| Pages: | 3 |
| | Recorded: | 05/02/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10089098
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Filing Dt:
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04/12/2002
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Title:
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PRODUCTION OF A DENSE MIST OF MICROMETRIC DROPLETS IN PARTICULAR FOR EXTREME UV LITHOGRAPHY
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Assignee
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| 31-33 RUE DE LA FEDERATION |
| 75752 PARIS 15EME, FRANCE |
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Correspondence name and address
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OBLON, SPIVAK, MCCLLEAND, ET AL.
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MARVIN J. SPIVAK
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1755 JEFFERSON DAVIS HWY., FOURTH FLOOR
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ARLINGTON, VIRGINIA 22202
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