Patent Assignment Details
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| Reel/Frame: | 019426/0569 | |
| Pages: | 7 |
| | Recorded: | 06/14/2007 | | |
| Attorney Dkt #: | 081468-0352017 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/06/2009
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Application #:
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10582247
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Filing Dt:
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06/12/2007
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Publication #:
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Pub Dt:
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11/29/2007
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Title:
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SENSOR FOR LITHOGRAPHIC APPARATUS AND METHOD OF OBTAINING MEASUREMENTS OF LITHOGRAPHIC APPARATUS
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Assignees
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| GROENEWOUDSEWEG 1 |
| EINDHOVEN, NETHERLANDS NL-5621 BA |
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Correspondence name and address
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CARRIE SADOWSKI ON BEHALF OF G. BAEZA
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1650 TYSON'S BLVD.
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MCLEAN, VA 22102
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