Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 034415/0571 | |
| Pages: | 12 |
| | Recorded: | 12/08/2014 | | |
| Attorney Dkt #: | 03147.0085.USP0 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
2
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Patent #:
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Issue Dt:
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05/30/2017
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Application #:
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14383569
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Filing Dt:
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09/08/2014
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Publication #:
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Pub Dt:
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04/23/2015
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Title:
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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM MEASUREMENT SENSOR
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Patent #:
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Issue Dt:
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05/30/2017
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Application #:
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14383569
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Filing Dt:
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09/08/2014
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Publication #:
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Pub Dt:
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04/23/2015
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PCT #:
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EP2013054723
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Title:
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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM MEASUREMENT SENSOR
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Assignee
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| COMPUTERLAAN 15 |
| DELFT, NETHERLANDS |
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Correspondence name and address
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MIKE MCGEE
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REMBRANDT TOWER, 31ST FL. AMSTELPLEIN 1
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AMSTERDAM, 1096 HA NETHERLANDS
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