Patent Assignment Details
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| Reel/Frame: | 009871/0573 | |
| Pages: | 3 |
| | Recorded: | 04/02/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09228835
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Filing Dt:
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01/12/1999
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Title:
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APPARATUS AND METHOD FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) IN A SINGLE WAFER REACTOR
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Assignee
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| 4771 ARROYO VISTA, SUITE H |
| LIVERMORE, CALIFORNIA 94550 |
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Correspondence name and address
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ROSENBLUM, PARISH & ISAACS
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DAVID H. JAFFER
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160 W. SANTA CLARA STREET
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15TH STREET
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SAN JOSE, CA 95113
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