Patent Assignment Details
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| Reel/Frame: | 023020/0585 | |
| Pages: | 7 |
| | Recorded: | 07/29/2009 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12398390
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Filing Dt:
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03/05/2009
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Publication #:
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Pub Dt:
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11/12/2009
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Title:
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PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTECTIVE LAYER BEFORE AND/OR DURING THE PLASMA MEDIATED ASHING PROCESS
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Assignee
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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CANTOR COLBURN LLP
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20 CHURCH STREET, 22ND FLOOR
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HARTFORD, CT 06103
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