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Reel/Frame:018859/0598   Pages: 3
Recorded: 02/06/2007
Attorney Dkt #:303200US26
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/02/2010
Application #:
11671821
Filing Dt:
02/06/2007
Publication #:
Pub Dt:
08/23/2007
Title:
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM
Assignors
1
Exec Dt:
01/12/2007
2
Exec Dt:
01/12/2007
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-8481
Correspondence name and address
ROBERT SINNOTT
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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