Patent Assignment Details
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| Reel/Frame: | 013668/0599 | |
| Pages: | 2 |
| | Recorded: | 01/15/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10277801
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Filing Dt:
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10/23/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR FORMING NITRIDE LAYER USING THE SAME
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Assignee
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| 233 METCALFE STREET |
| OTTAWA, ON, CANADA K2P 2C2 |
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Correspondence name and address
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BORDEN LADNER GERVIAS LLP
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LESLIE ANNE KINSMAN
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1100-100 QUEEN STREET
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WORLD EXCHANGE PLAZA
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OTTAWA, ON, CAX K1P 1J9
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