Patent Assignment Details
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Reel/Frame: | 013087/0602 | |
| Pages: | 3 |
| | Recorded: | 07/03/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10190412
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Filing Dt:
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07/03/2002
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Publication #:
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Pub Dt:
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01/08/2004
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Title:
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PLASMA CHAMBER EQUIPPED WITH TEMPERATURE-CONTROLLED FOCUS RING AND METHOD OF OPERATING
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 121 PARK AVENUE 3 |
HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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TUNG & ASSOCIATES
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RANDY W. TUNG
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838 W. LONG LAKE ROAD
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SUITE 120
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BLOOMFIELD HILLS, MICHIGAN 48302
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