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Reel/Frame:	049296/0606			Pages:	63
		Recorded:	05/07/2019
Attorney Dkt #:	14261.0999-00000
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 203
Page 1 of 3
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Patent #:	6335783	Issue Dt:	01/01/2002	Application #:	09424575	Filing Dt:	01/07/2000
Title:	LITHOGRAPHY SYSTEM

Patent #:	6844560	Issue Dt:	01/18/2005	Application #:	10218223	Filing Dt:	08/13/2002
Publication #:	US20030030014	Pub Dt:	02/13/2003
Title:	LITHOGRAPHY SYSTEM COMPRISING A CONVERTER PLATE AND MEANS FOR PROTECTING THE CONVERTER PLATE

Patent #:	6919952	Issue Dt:	07/19/2005	Application #:	10391956	Filing Dt:	03/19/2003
Publication #:	US20030219572	Pub Dt:	11/27/2003
Title:	DIRECT WRITE LITHOGRAPHY SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	10392228	Filing Dt:	03/18/2003
Publication #:	US20030178583	Pub Dt:	09/25/2003
Title:	Field emission photo-cathode array for lithography system and lithography system provided with such an array

Patent #:	7988136	Issue Dt:	08/02/2011	Application #:	10510082	Filing Dt:	11/28/2007
Publication #:	US20080219805	Pub Dt:	09/11/2008
Title:	STAGE DEVICE FOR A VACUUM CHAMBER

Patent #:	7019312	Issue Dt:	03/28/2006	Application #:	10600953	Filing Dt:	06/20/2003
Publication #:	US20040051055	Pub Dt:	03/18/2004
Title:	ADJUSTMENT IN A MAPPER SYSTEM

Patent #:	6958804	Issue Dt:	10/25/2005	Application #:	10692632	Filing Dt:	10/24/2003
Publication #:	US20040135983	Pub Dt:	07/15/2004
Title:	LITHOGRAPHY SYSTEM

Patent #:	6897458	Issue Dt:	05/24/2005	Application #:	10699246	Filing Dt:	10/30/2003
Publication #:	US20040141169	Pub Dt:	07/22/2004
Title:	ELECTRON BEAM EXPOSURE SYSTEM

Patent #:	7215070	Issue Dt:	05/08/2007	Application #:	10778787	Filing Dt:	02/13/2004
Publication #:	US20060028114	Pub Dt:	02/09/2006
Title:	SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION

Patent #:	7129502	Issue Dt:	10/31/2006	Application #:	10797364	Filing Dt:	03/10/2004
Publication #:	US20040232349	Pub Dt:	11/25/2004
Title:	APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS

Patent #:	7084414	Issue Dt:	08/01/2006	Application #:	10856050	Filing Dt:	05/27/2004
Publication #:	US20050161621	Pub Dt:	07/28/2005
Title:	CHARGED PARTICLE BEAMLET EXPOSURE SYSTEM

Patent #:	7019908	Issue Dt:	03/28/2006	Application #:	10909167	Filing Dt:	07/29/2004
Publication #:	US20050062950	Pub Dt:	03/24/2005
Title:	MODULATOR CIRCUITRY

Patent #:	7453075	Issue Dt:	11/18/2008	Application #:	11118162	Filing Dt:	04/29/2005
Publication #:	US20050269528	Pub Dt:	12/08/2005
Title:	CHARGED PARTICLE BEAM EXPOSURE SYSTEM

Patent #:	7091504	Issue Dt:	08/15/2006	Application #:	11128512	Filing Dt:	05/12/2005
Publication #:	US20050211921	Pub Dt:	09/29/2005
Title:	ELECTRON BEAM EXPOSURE SYSTEM

Patent #:	8153991	Issue Dt:	04/10/2012	Application #:	11149893	Filing Dt:	06/10/2005
Publication #:	US20050224726	Pub Dt:	10/13/2005
Title:	DIRECT WRITE LITHOGRAPHY SYSTEM

Patent #:	7173263	Issue Dt:	02/06/2007	Application #:	11225604	Filing Dt:	09/12/2005
Publication #:	US20060006349	Pub Dt:	01/12/2006
Title:	OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM

Patent #:	8890095	Issue Dt:	11/18/2014	Application #:	11492572	Filing Dt:	07/24/2006
Publication #:	US20070029507	Pub Dt:	02/08/2007
Title:	RELIABILITY IN A MASKLESS LITHOGRAPHY SYSTEM

Patent #:	7709815	Issue Dt:	05/04/2010	Application #:	11521671	Filing Dt:	09/15/2006
Publication #:	US20070064213	Pub Dt:	03/22/2007
Title:	LITHOGRAPHY SYSTEM AND PROJECTION METHOD

Patent #:	7868300	Issue Dt:	01/11/2011	Application #:	11521705	Filing Dt:	09/14/2006
Publication #:	US20070057204	Pub Dt:	03/15/2007
Title:	LITHOGRAPHY SYSTEM, SENSOR AND MEASURING METHOD

Patent #:	7365338	Issue Dt:	04/29/2008	Application #:	11527206	Filing Dt:	09/25/2006
Publication #:	US20070018112	Pub Dt:	01/25/2007
Title:	APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS

Patent #:	7391037	Issue Dt:	06/24/2008	Application #:	11544980	Filing Dt:	10/06/2006
Publication #:	US20070029499	Pub Dt:	02/08/2007
Title:	APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS

Patent #:	7348567	Issue Dt:	03/25/2008	Application #:	11545975	Filing Dt:	10/10/2006
Publication #:	US20080073547	Pub Dt:	03/27/2008
Title:	APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS

Patent #:	7569833	Issue Dt:	08/04/2009	Application #:	11545976	Filing Dt:	10/10/2006
Publication #:	US20070029509	Pub Dt:	02/08/2007
Title:	APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS

Patent #:	7710009	Issue Dt:	05/04/2010	Application #:	11650310	Filing Dt:	01/05/2007
Publication #:	US20070182303	Pub Dt:	08/09/2007
Title:	SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION

Patent #:	8242470	Issue Dt:	08/14/2012	Application #:	11653107	Filing Dt:	01/11/2007
Publication #:	US20070187625	Pub Dt:	08/16/2007
Title:	OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM

Patent #:	7842936	Issue Dt:	11/30/2010	Application #:	11716452	Filing Dt:	03/09/2007
Publication #:	US20080073588	Pub Dt:	03/27/2008
Title:	LITHOGRAPHY SYSTEM AND PROJECTION METHOD

Patent #:	8325321	Issue Dt:	12/04/2012	Application #:	11880833	Filing Dt:	07/24/2007
Publication #:	US20080024743	Pub Dt:	01/31/2008
Title:	LITHOGRAPHY SYSTEM, METHOD OF HEAT DISSIPATION AND FRAME

Patent #:	8134135	Issue Dt:	03/13/2012	Application #:	11880872	Filing Dt:	07/23/2007
Publication #:	US20080023643	Pub Dt:	01/31/2008
Title:	MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

Patent #:	7612866	Issue Dt:	11/03/2009	Application #:	11982119	Filing Dt:	11/01/2007
Publication #:	US20080061247	Pub Dt:	03/13/2008
Title:	LITHOGRAPHY SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	12041634	Filing Dt:	03/03/2008
Publication #:	US20080158536	Pub Dt:	07/03/2008
Title:	OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	12041635	Filing Dt:	03/03/2008
Publication #:	US20080158537	Pub Dt:	07/03/2008
Title:	OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM

Patent #:	RE44240	Issue Dt:	05/28/2013	Application #:	12189817	Filing Dt:	08/12/2008
Title:	ELECTRON BEAM EXPOSURE SYSTEM

Patent #:	8705010	Issue Dt:	04/22/2014	Application #:	12218080	Filing Dt:	07/11/2008
Publication #:	US20090027649	Pub Dt:	01/29/2009
Title:	Lithography system, method of clamping and wafer table

Patent #:	7868307	Issue Dt:	01/11/2011	Application #:	12288877	Filing Dt:	10/24/2008
Publication #:	US20090065711	Pub Dt:	03/12/2009
Title:	CHARGED PARTICLE BEAM EXPOSURE SYSTEM

Patent #:	8089056	Issue Dt:	01/03/2012	Application #:	12393049	Filing Dt:	02/26/2009
Publication #:	US20090212229	Pub Dt:	08/27/2009
Title:	PROJECTION LENS ARRANGEMENT

Patent #:	NONE	Issue Dt:		Application #:	12393050	Filing Dt:	02/26/2009
Publication #:	US20090261267	Pub Dt:	10/22/2009
Title:	PROJECTION LENS ARRANGEMENT

Patent #:	8796644	Issue Dt:	08/05/2014	Application #:	12542478	Filing Dt:	08/17/2009
Publication #:	US20100044578	Pub Dt:	02/25/2010
Title:	CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE

Patent #:	8525134	Issue Dt:	09/03/2013	Application #:	12611847	Filing Dt:	11/03/2009
Publication #:	US20100045958	Pub Dt:	02/25/2010
Title:	LITHOGRAPHY SYSTEM

Patent #:	8431912	Issue Dt:	04/30/2013	Application #:	12613429	Filing Dt:	11/05/2009
Publication #:	US20100117001	Pub Dt:	05/13/2010
Title:	SIMULTANEOUS MEASUREMENT OF BEAMS IN LITHOGRAPHY SYSTEM

Patent #:	9460954	Issue Dt:	10/04/2016	Application #:	12708543	Filing Dt:	02/19/2010
Publication #:	US20100265486	Pub Dt:	10/21/2010
Title:	METHOD OF CLAMPING A SUBSTRATE AND CLAMP PREPARATION UNIT USING CAPILLARY CLAMPING FORCE

Patent #:	NONE	Issue Dt:		Application #:	12708544	Filing Dt:	02/19/2010
Publication #:	US20110042579	Pub Dt:	02/24/2011
Title:	CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER

Patent #:	8690005	Issue Dt:	04/08/2014	Application #:	12708545	Filing Dt:	02/19/2010
Publication #:	US20100270299	Pub Dt:	10/28/2010
Title:	CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER

Patent #:	8436324	Issue Dt:	05/07/2013	Application #:	12709640	Filing Dt:	02/22/2010
Publication #:	US20100238421	Pub Dt:	09/23/2010
Title:	PREPARATION UNIT FOR LITHOGRAPHY MACHINE

Patent #:	8366423	Issue Dt:	02/05/2013	Application #:	12709643	Filing Dt:	02/22/2010
Publication #:	US20100269911	Pub Dt:	10/28/2010
Title:	METHOD AND ARRANGEMENT FOR REALIZING A VACUUM IN A VACUUM CHAMBER

Patent #:	8991330	Issue Dt:	03/31/2015	Application #:	12709645	Filing Dt:	02/22/2010
Publication #:	US20100236476	Pub Dt:	09/23/2010
Title:	Substrate Support Structure, Clamp Preparation Unit, and Lithography System

Patent #:	NONE	Issue Dt:		Application #:	12709647	Filing Dt:	02/22/2010
Publication #:	US20110049393	Pub Dt:	03/03/2011
Title:	Lithography Machine and Substrate Handling Arrangement

Patent #:	8242467	Issue Dt:	08/14/2012	Application #:	12728965	Filing Dt:	03/22/2010
Publication #:	US20100171046	Pub Dt:	07/08/2010
Title:	LITHOGRAPHY SYSTEM AND PROJECTION METHOD

Patent #:	8247958	Issue Dt:	08/21/2012	Application #:	12750619	Filing Dt:	03/30/2010
Publication #:	US20100219357	Pub Dt:	09/02/2010
Title:	SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION

Patent #:	8110813	Issue Dt:	02/07/2012	Application #:	12769712	Filing Dt:	04/29/2010
Publication #:	US20100276606	Pub Dt:	11/04/2010
Title:	CHARGED PARTICLE OPTICAL SYSTEM COMPRISING AN ELECTROSTATIC DEFLECTOR

Patent #:	8294117	Issue Dt:	10/23/2012	Application #:	12885380	Filing Dt:	09/17/2010
Publication #:	US20110068276	Pub Dt:	03/24/2011
Title:	MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

Patent #:	8624478	Issue Dt:	01/07/2014	Application #:	12898665	Filing Dt:	10/05/2010
Publication #:	US20110084592	Pub Dt:	04/14/2011
Title:	HIGH VOLTAGE SHIELDING ARRANGEMENT OF A CHARGED PARTICLE LITHOGRAPHY SYSTEM

Patent #:	8362441	Issue Dt:	01/29/2013	Application #:	12901468	Filing Dt:	10/08/2010
Publication #:	US20110084220	Pub Dt:	04/14/2011
Title:	ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY

Patent #:	8445869	Issue Dt:	05/21/2013	Application #:	12905126	Filing Dt:	10/15/2010
Publication #:	US20120091358	Pub Dt:	04/19/2012
Title:	PROJECTION LENS ARRANGEMENT

Patent #:	8258484	Issue Dt:	09/04/2012	Application #:	12905131	Filing Dt:	10/15/2010
Publication #:	US20120091318	Pub Dt:	04/19/2012
Title:	BEAMLET BLANKER ARRANGEMENT

Patent #:	8841636	Issue Dt:	09/23/2014	Application #:	12911859	Filing Dt:	10/26/2010
Publication #:	US20110261340	Pub Dt:	10/27/2011
Title:	Modulation device and charged particle multi-beamlet lithography system using the same

Patent #:	8987677	Issue Dt:	03/24/2015	Application #:	12911861	Filing Dt:	10/26/2010
Publication #:	US20110266418	Pub Dt:	11/03/2011
Title:	CHARGED PARTICLE MULTI-BEAMLET LITHOGRAPHY SYSTEM, MODULATION DEVICE , AND METHOD OF MANUFACTURING THEREOF

Patent #:	8492731	Issue Dt:	07/23/2013	Application #:	12911911	Filing Dt:	10/26/2010
Publication #:	US20110260040	Pub Dt:	10/27/2011
Title:	Charged particle multi-beamlet lithography system with modulation device

Patent #:	8502174	Issue Dt:	08/06/2013	Application #:	12960675	Filing Dt:	12/06/2010
Publication #:	US20110073782	Pub Dt:	03/31/2011
Title:	METHOD OF AND SYSTEM FOR EXPOSING A TARGET

Patent #:	8952342	Issue Dt:	02/10/2015	Application #:	12970842	Filing Dt:	12/16/2010
Publication #:	US20110147612	Pub Dt:	06/23/2011
Title:	SUPPORT AND POSITIONING STRUCTURE, SEMICONDUCTOR EQUIPMENT SYSTEM AND METHOD FOR POSITIONING

Patent #:	8570055	Issue Dt:	10/29/2013	Application #:	12977240	Filing Dt:	12/23/2010
Publication #:	US20110193574	Pub Dt:	08/11/2011
Title:	CAPACITIVE SENSING SYSTEM

Patent #:	8638109	Issue Dt:	01/28/2014	Application #:	12977288	Filing Dt:	12/23/2010
Publication #:	US20110254565	Pub Dt:	10/20/2011
Title:	CAPACITIVE SENSING SYSTEM WITH DIFFERENTIAL PAIRS

Patent #:	NONE	Issue Dt:		Application #:	12977346	Filing Dt:	12/23/2010
Publication #:	US20110261344	Pub Dt:	10/27/2011
Title:	EXPOSURE METHOD

Patent #:	8513959	Issue Dt:	08/20/2013	Application #:	12977404	Filing Dt:	12/23/2010
Publication #:	US20110193573	Pub Dt:	08/11/2011
Title:	INTEGRATED SENSOR SYSTEM

Patent #:	8502176	Issue Dt:	08/06/2013	Application #:	12994230	Filing Dt:	11/23/2010
Publication #:	US20110079730	Pub Dt:	04/07/2011
Title:	IMAGING SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	13010658	Filing Dt:	01/20/2011
Publication #:	US20110174985	Pub Dt:	07/21/2011
Title:	LITHOGRAPHY SYSTEM WITH LENS ROTATION

Patent #:	8514370	Issue Dt:	08/20/2013	Application #:	13030217	Filing Dt:	02/18/2011
Publication #:	US20120043438	Pub Dt:	02/23/2012
Title:	SUBSTRATE SUPPORT STRUCTURE, CLAMP PREPARATION UNIT, AND LITHOGRAPHY SYSTEM

Patent #:	8188450	Issue Dt:	05/29/2012	Application #:	13050875	Filing Dt:	03/17/2011
Publication #:	US20110163244	Pub Dt:	07/07/2011
Title:	MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

Patent #:	8357906	Issue Dt:	01/22/2013	Application #:	13053488	Filing Dt:	03/22/2011
Publication #:	US20110253900	Pub Dt:	10/20/2011
Title:	LITHOGRAPHY SYSTEM, SENSOR, CONVERTER ELEMENT AND METHOD OF MANUFACTURE

Patent #:	8648318	Issue Dt:	02/11/2014	Application #:	13071225	Filing Dt:	03/24/2011
Publication #:	US20110168910	Pub Dt:	07/14/2011
Title:	MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

Patent #:	8198602	Issue Dt:	06/12/2012	Application #:	13076540	Filing Dt:	03/31/2011
Publication #:	US20110216299	Pub Dt:	09/08/2011
Title:	ELECTROSTATIC LENS STRUCTURE

Patent #:	8263942	Issue Dt:	09/11/2012	Application #:	13082333	Filing Dt:	04/07/2011
Publication #:	US20110180721	Pub Dt:	07/28/2011
Title:	SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION

Patent #:	NONE	Issue Dt:		Application #:	13237797	Filing Dt:	09/20/2011
Publication #:	US20120069317	Pub Dt:	03/22/2012
Title:	LITHOGRAPHY SYSTEM ARRANGED ON A FOUNDATION, AND METHOD FOR ARRANGING A LITHOGRAPHY SYSTEM ON SAID FOUNDATION

Patent #:	9287081	Issue Dt:	03/15/2016	Application #:	13281558	Filing Dt:	10/26/2011
Publication #:	US20120145931	Pub Dt:	06/14/2012
Title:	LITHOGRAPHY SYSTEM, MODULATION DEVICE AND METHOD OF MANUFACTURING A FIBER FIXATION SUBSTRATE

Patent #:	8921758	Issue Dt:	12/30/2014	Application #:	13281559	Filing Dt:	10/26/2011
Publication #:	US20120273658	Pub Dt:	11/01/2012
Title:	MODULATION DEVICE AND CHARGED PARTICLE MULTI-BEAMLET LITHOGRAPHY SYSTEM USING THE SAME

Patent #:	NONE	Issue Dt:		Application #:	13284634	Filing Dt:	10/28/2011
Publication #:	US20120043457	Pub Dt:	02/23/2012
Title:	OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM

Patent #:	9305747	Issue Dt:	04/05/2016	Application #:	13290139	Filing Dt:	11/07/2011
Publication #:	US20120287410	Pub Dt:	11/15/2012
Title:	DATA PATH FOR LITHOGRAPHY APPARATUS

Patent #:	8884255	Issue Dt:	11/11/2014	Application #:	13290141	Filing Dt:	11/07/2011
Publication #:	US20120286168	Pub Dt:	11/15/2012
Title:	DATA PATH FOR LITHOGRAPHY APPARATUS

Patent #:	8598544	Issue Dt:	12/03/2013	Application #:	13293370	Filing Dt:	11/10/2011
Publication #:	US20120286169	Pub Dt:	11/15/2012
Title:	METHOD OF GENERATING A TWO-LEVEL PATTERN FOR LITHOGRAPHIC PROCESSING AND PATTERN GENERATOR USING THE SAME

Patent #:	9691589	Issue Dt:	06/27/2017	Application #:	13293393	Filing Dt:	11/10/2011
Publication #:	US20120286170	Pub Dt:	11/15/2012
Title:	DUAL PASS SCANNING

Patent #:	8710465	Issue Dt:	04/29/2014	Application #:	13293426	Filing Dt:	11/10/2011
Publication #:	US20120286173	Pub Dt:	11/15/2012
Title:	PATTERN DATA CONVERSION FOR LITHOGRAPHY SYSTEM

Patent #:	9030675	Issue Dt:	05/12/2015	Application #:	13295159	Filing Dt:	11/14/2011
Publication #:	US20120293810	Pub Dt:	11/22/2012
Title:	METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

Patent #:	9208989	Issue Dt:	12/08/2015	Application #:	13295243	Filing Dt:	11/14/2011
Publication #:	US20120145915	Pub Dt:	06/14/2012
Title:	Lithography system and method of refracting

Patent #:	8558196	Issue Dt:	10/15/2013	Application #:	13295246	Filing Dt:	11/14/2011
Publication #:	US20120292524	Pub Dt:	11/22/2012
Title:	CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH APERTURE ARRAY COOLING

Patent #:	8586949	Issue Dt:	11/19/2013	Application #:	13295249	Filing Dt:	11/14/2011
Publication #:	US20120293780	Pub Dt:	11/22/2012
Title:	CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER

Patent #:	8604411	Issue Dt:	12/10/2013	Application #:	13295252	Filing Dt:	11/14/2011
Publication #:	US20120292491	Pub Dt:	11/22/2012
Title:	CHARGED PARTICLE BEAM MODULATOR

Patent #:	8779392	Issue Dt:	07/15/2014	Application #:	13298152	Filing Dt:	11/16/2011
Publication #:	US20120056100	Pub Dt:	03/08/2012
Title:	CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE

Patent #:	9105439	Issue Dt:	08/11/2015	Application #:	13304427	Filing Dt:	11/25/2011
Publication #:	US20120061583	Pub Dt:	03/15/2012
Title:	PROJECTION LENS ARRANGEMENT

Patent #:	8895943	Issue Dt:	11/25/2014	Application #:	13323950	Filing Dt:	12/13/2011
Publication #:	US20120175527	Pub Dt:	07/12/2012
Title:	LITHOGRAPHY SYSTEM AND METHOD OF PROCESSING SUBSTRATES IN SUCH A LITHOGRAPHY SYSTEM

Patent #:	RE44908	Issue Dt:	05/27/2014	Application #:	13343036	Filing Dt:	01/04/2012
Title:	ELECTRON BEAM EXPOSURE SYSTEM

Patent #:	RE45049	Issue Dt:	07/29/2014	Application #:	13343038	Filing Dt:	01/04/2012
Title:	ELECTRON BEAM EXPOSURE SYSTEM

Patent #:	8884253	Issue Dt:	11/11/2014	Application #:	13397703	Filing Dt:	02/16/2012
Publication #:	US20130043414	Pub Dt:	02/21/2013
Title:	SYSTEM FOR MAGNETIC SHIELDING

Patent #:	8653485	Issue Dt:	02/18/2014	Application #:	13397814	Filing Dt:	02/16/2012
Publication #:	US20120145916	Pub Dt:	06/14/2012
Title:	PROJECTION LENS ARRANGEMENT

Patent #:	8610093	Issue Dt:	12/17/2013	Application #:	13402116	Filing Dt:	02/22/2012
Publication #:	US20120224155	Pub Dt:	09/06/2012
Title:	DIRECT WRITE LITHOGRAPHY SYSTEM

Patent #:	9678443	Issue Dt:	06/13/2017	Application #:	13436736	Filing Dt:	03/30/2012
Publication #:	US20120249984	Pub Dt:	10/04/2012
Title:	LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE

Patent #:	9069265	Issue Dt:	06/30/2015	Application #:	13436738	Filing Dt:	03/30/2012
Publication #:	US20120250026	Pub Dt:	10/04/2012
Title:	INTERFEROMETER MODULE

Patent #:	9261800	Issue Dt:	02/16/2016	Application #:	13436741	Filing Dt:	03/30/2012
Publication #:	US20120250030	Pub Dt:	10/04/2012
Title:	ALIGNMENT OF AN INTERFEROMETER MODULE FOR USE IN AN EXPOSURE TOOL

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Title:	Network architecture and protocol for cluster of lithography machines

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Title:	NETWORK ARCHITECTURE FOR LITHOGRAPHY MACHINE CLUSTER

100

Patent #:	9395635	Issue Dt:	07/19/2016	Application #:	13453986	Filing Dt:	04/23/2012
Publication #:	US20120267802	Pub Dt:	10/25/2012
Title:	POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HAVING A PARTIALLY REFLECTIVE POSITION MARK

Assignor

WITTEKAMP, J.J.

Exec Dt:

02/06/2019

Assignee

ASML NETHERLANDS B.V.

DE RUN 6501

DR VELDHOVEN, NETHERLANDS 5504

Correspondence name and address
	FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP
	901 NEW YORK AVENUE NW
	WASHINGTON, DC 20001

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