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Total properties:
14
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08770907
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Filing Dt:
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12/20/1996
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Title:
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PROCESS FOR DEPOSITING A MATERIAL ON A SUBSTRATE USING LIGHT ENERGY
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08771058
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Filing Dt:
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12/20/1996
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Title:
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SYSTEM FOR DEPOSITING A MATERIAL ON A SUBSTRATE USING LIGHT ENERGY
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08843925
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Filing Dt:
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04/17/1997
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Title:
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APPARATUS AND METHOD FOR DETERMINING THE TEMPERATURE OF A RADIATING SURFACE
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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08893699
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Filing Dt:
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07/11/1997
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Title:
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APPARATUS AND METHOD FOR FILTERING LIGHT IN A THERNAL PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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08899865
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Filing Dt:
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07/24/1997
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Title:
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APPARATUS FOR DETERMINING THE TEMPERATURE OF A SEMI-TRANSPARENT RADIATING BODY
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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08908228
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Filing Dt:
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08/07/1997
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Title:
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PROCESS FOR PREVENTING GS LEAKS IN AN ATMOSPHERIC THERMAL PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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08984652
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Filing Dt:
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12/03/1997
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Title:
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HEATING ELEMENT FOR HEATING THE EDGES OF WAFERS IN THERMAL PROCESSING CHAMBERS
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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09013247
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Filing Dt:
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01/26/1998
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Title:
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PROCESS FOR FORMING COATINGS ON SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09041536
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Filing Dt:
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03/12/1998
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Title:
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APPARATUS AND METHOD FOR DETERMINING THE TEMPERATURE OF OBJECTS IN THERMAL PROCESSING CHAMBERS
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09052506
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Filing Dt:
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03/31/1998
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Title:
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SYSTEM FOR MEASURING THE TEMPERATURE OF A SEMICONDUCTOR WAFER DURING THERMAL PROCESSING
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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09078865
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Filing Dt:
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05/14/1998
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Title:
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HEATING DEVICE FOR SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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09093493
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Filing Dt:
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06/08/1998
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Title:
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APPARATUS AND PROCESS FOR MEASURING THE TEMPLERATURE OF SEMICONDUCTOR WAFERS IN THE PRESENCE OF RADIATION ABSORBING GASES
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09150280
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Filing Dt:
|
09/09/1998
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Title:
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HEATING DEVICE CONTAINING A MULTI-LAMP CONE FOR HEATING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09208958
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Filing Dt:
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12/10/1998
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Title:
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RAPID THERMAL PROCESSING CHAMBER FOR PROCESSING MULTIPLE WAFERS
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